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Structure Studies of Thin Amorphous Films by Synchrotron X-Ray Absorption and Analytical Electron Microscopy.

  • S. M. Heald (a1) and J. Tafto (a1)

Abstract

We combine the techniques of EXAFS and XANES using synchrotron x-rays, and the corresponding techniques using electron energy loss spectroscopy (EXELFS and ELNES) to characterize and study the local atomic arrangement in thin amorphous films. These probes are complementary in that x-rays are best suited for absorption edges above 3 keV and electron energy loss spectroscopy for low energy edges, and thus this combination is very useful for amorphous materials containing both low and high Z elements. We use in addition transmission electron microscopy, electron diffraction, and electron energy loss spectroscopy in the low energy loss region. Results from amorphous T1O2 and amorphous SnO2 made by reactive sputtering are presented.

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1. Gurmen, S. J.. J. Mat. Sci. 17, 1541 (1982).
2. Greaves, G. N., EXAFS and Near Edge Structure, Bianconi, A., Inoccia, L., and Stipcich, S., Editors, pp. 248, Springer-Verlag, Berlin, 1983.
3. Stern, E. A. and Heald, S. M., Handbook of Synchrotron Radiation, Koch, E. E., Editor, Vol. lb, pp. 955, North-Holland, Amsterdam, 1983.
4. Heald, S. M., Keller, E., and Stern, E. A., Phys. Lett. 103A, 155 (1984).
5. More details of the electron microscope studies on SnO2 can be found in: Tafto, J., Rajeswaran, G., and Vanier, P. E.. J. Appl. Phys. 60, 602 (1986).
6. Greegor, R. B., Lytle, F. W., Sandstrom, D. R., Wong, J., and Schultz, P., J. Non-Crys. Solids 55, 27 (1983).

Structure Studies of Thin Amorphous Films by Synchrotron X-Ray Absorption and Analytical Electron Microscopy.

  • S. M. Heald (a1) and J. Tafto (a1)

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