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Structure Stability in Plasma Chemistry

Published online by Cambridge University Press:  10 February 2011

Ji-Tao Wang ,
David Wei Zhang ,
Zhi-Jie Liu ,
Jian-Yun Zhang ,
Shi-Jin Ding  and
Peng-Fei Wang
Ji-Tao Wang
Affiliation:
Fudan University, Dept. of EFlectronic Eng., 200433 Shanghai, China.
David Wei Zhang
Affiliation:
Fudan University, Dept. of EFlectronic Eng., 200433 Shanghai, China.
Zhi-Jie Liu
Affiliation:
Fudan University, Dept. of EFlectronic Eng., 200433 Shanghai, China.
Jian-Yun Zhang
Affiliation:
Fudan University, Dept. of EFlectronic Eng., 200433 Shanghai, China.
Shi-Jin Ding
Affiliation:
Fudan University, Dept. of EFlectronic Eng., 200433 Shanghai, China.
Peng-Fei Wang
Affiliation:
Fudan University, Dept. of EFlectronic Eng., 200433 Shanghai, China.
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Abstract

Diamond is a metastable phase, while graphite is a stable phase in low pressure equilibrium phase diagrams of carbon. However, diamond with saturated structure of π bonds is more stable than graphite with unsaturated structure of n bonds during the existence of activated particles generated by plasma. That provides an excellent explanation for the plasma and other activated CVD diamond growth under low pressure taking place with simultaneous graphite etching.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 544: Symposium Y – Plasma Deposition and Treatment of Polymers , 1998 , 101
Copyright
Copyright © Materials Research Society 1999

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