Skip to main content Accessibility help
×
Home

Structure And Mechanical Properties Of Reactive Sputter Deposited Tin/Tan Multilayered Films

  • W.-H. Soe (a1), T. Kitagaki (a2), H. Ueda (a3), N. Shima (a3), M. Otsuka (a2) and R. Yamamoto (a1)...

Abstract

TiN/TaN multilayers were grown by reactive magnetron sputtering on WC-Co sintered hard alloy and MgO(100) single crystal substrates. Multilayer structure and composition modulation amplitudes were studied using x-ray diffraction method. Hardness and elastic modulus were mea- sured by nanoindentation tester. For bilayer thickness (Λ) larger than 80 A˚, hardness are lower than rule-of-mixtures value of individual single layers, and increased rapidly with decreasing Λ, peaking at hardness values ≈33% higher than that at A=43 Å. As a result of analysis the inclination of applied load for indenter displacement on P-h curve (ΔP/Δh), this paper exhibits that the en- hancement of the resistance to dislocation motion and elastic anomaly due to coherency strains are responsible for the hardness change.

Copyright

References

Hide All
1. Koehler, J. C., Phys. Rev. B 2, 547 (1970).
2. Cammarata, R. C., Schlesinger, T. E., Kim, C., Qadri, S. B., and Edelstein, A. S., Appl. Phys. Lett. 56, 1862 (1990).
3. Helmersson, U., Todorova, S., Barnett, S. A., Sundgren, J. E., Markert, L. C., and Greene, J. E., J. Appl. Phys. 62,481 (1987).
4. Mirkarimi, P. B., Hultman, L., and Barnett, S. A., Appl. Phys. Lett. 57, 2654 (1990).
5. Shinn, M., Hultman, L., and Barnett, S. A., J. Mater. Res. 7,901 (1992).
6. Chu, X., Wong, M. S., Sproul, W. D., Rohde, S. L., and Barnett, S. A., J. Vac. Sci. Technol. A 10, 1604(1992).
7. Baral, D., Ketterson, J. B., and Hilliard, J. E., in Modulated Structure Materials, Ed. Tsakalakos, T., Nijhoff Publ., Dordrecht, p.465 (1984).
8. Barnett, S. A., and Shinn, M., Annu. Rev. Mater. Sci. 24,481 (1994).
9. Shinn, M., and Barnett, S. A., Appl. Phys. Lett. 64, 61 (1994).
10. Krzanowski, J. E., Scr. Metall. 25, 1465 (1991).
11. Cahn, J. W., Acta Met. 11, 1274 (1963).

Related content

Powered by UNSILO

Structure And Mechanical Properties Of Reactive Sputter Deposited Tin/Tan Multilayered Films

  • W.-H. Soe (a1), T. Kitagaki (a2), H. Ueda (a3), N. Shima (a3), M. Otsuka (a2) and R. Yamamoto (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.