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Structural Phase Transition in Buried CoSi2 Layers

Published online by Cambridge University Press:  25 February 2011

W. G. Spanninga ,
A. R. Sandy  and
L. Niesen
W. G. Spanninga
Affiliation:
Nuclear Solid State Physics and Materials Science Centre, Nijenborgh 4, NL-9747 AG Groningen, The, Netherlands.
A. R. Sandy
Affiliation:
Physics Department, Risø National Laboratory, P.O. Box 49, DK-4000 Roskilde, Denmark.
L. Niesen
Affiliation:
Nuclear Solid State Physics and Materials Science Centre, Nijenborgh 4, NL-9747 AG Groningen, The, Netherlands.
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Abstract

Heteroepitaxial Si/CoSi2/Si<111> structures were made by high dose implantation of Co in a Si wafer. These single crystaline layers were investigated with 57Co source Mössbauer spectroscopy, 4He ion channeling and X-ray scattering. All results show there is a structural phase transition in the buried CoSi2 layer at a temperature around 200 K.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 171
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. White, Alice E., Short, K. T., Dynes, R. C., Hull, R. and Vandenberg, J. M., Nuclear Instruments and Methods B, 39, 253–258 (1989).CrossRefGoogle Scholar
2. van Ommen, A. H., Ottenheim, J. J. M., Theunissen, A. M. L. and Mouwen, A. G., Applied Physics Letters 53, 669–671 (1988).CrossRefGoogle Scholar
3. Vantomme, A., Dézsi, I. and Langouche, G., Nuclear Instruments and Methods B, 39, 284–287 (1989).CrossRefGoogle Scholar
4. Bulle-Lieuwma, C. W. T., van Ommen, A. H. and van Uzendoorn, L. J., Applied Physics Letters 54, 244 (1989).CrossRefGoogle Scholar
5. Spanninga, W. G., Niesen, L. and Smulders, P. J. M., Nuclear Instruments and Methods in Physics Research B, 63, 138–140 (1992).CrossRefGoogle Scholar
6. Spanninga, W. G., Niesen, L. and Smulders, P. J. M., Hyperfine Interactions 70, 927–930 (1992).CrossRefGoogle Scholar
7. Dézsi, I., Engelmann, H., Gonser, U. and Langouche, G., Hyperfine Interactions 33, 161–171 (1987).CrossRefGoogle Scholar
8. Fischer, A. E. M. J., Slijkerman, W. F. J., Nakagawa, K., Smith, R. J. and van der Veen, J. F., Journal of Applied Physics 64, 3005–3013 (1988).CrossRefGoogle Scholar