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Structural Effects in the Initial Stages of Epitaxy

Published online by Cambridge University Press:  22 February 2011

J. M. Pimbley  and
T.-M. Lu
J. M. Pimbley
Affiliation:
Center for Integrated Electronics and Physics Department, Rensselaer Polytechnic Institute, Troy, NY 12181 General Electric Corporate Research and Development Center, Schenectady, NY 12301
T.-M. Lu
Affiliation:
Center for Integrated Electronics and Physics Department, Rensselaer Polytechnic Institute, Troy, NY 12181
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Abstract

Structural effects of sub-monolayer epitaxial films are described by the pair correlation function of surface atoms. We have developed a new scheme to evaluate this atomic pair correlation function analytically and exactly for the combined overlayer and substrate system during the first stages of epitaxy. We employ this correlation function to calculate electron diffraction profiles from model surfaces and compare these calculations to recent LEED measurements of Si/Si(111) and W/W(110) epitaxy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 25: Symposium C – Thin Films and Interfaces II , 1983 , 375
Copyright
Copyright © Materials Research Society 1984

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References

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