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Structural Characterization of GaP/GaAs/GaP Heterostructure by TEM

  • G. Aragón (a1), S. I. Molina (a1) and R. García (a1)

Abstract

The defect structure in a GaP/GaAs/GaP heterostructure deposited on a (001) GaAs substrate with a GaAs buffer layer has been characterized by cross sectional TEM. The buffer layer presents dislocations and (α-δ)-fringe contrast parallel to (001) interface plane. HREM study reveals uniformly distributed amorphous capsules in the first GaP/GaAs buffer layer interface. The dominant defects are microtwins which are propagated into the overall heterostructure. Microtwin density is different in the GaP and GaAs layers.The different stress signs may explain the density difference.

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Structural Characterization of GaP/GaAs/GaP Heterostructure by TEM

  • G. Aragón (a1), S. I. Molina (a1) and R. García (a1)

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