ZnO was grown by Chemical Bath Deposition technique activated by microwaves (CBD-AμW) on corning glass substrates. The ZnO structural and optical properties are studied as a function of the urea concentration in the growth solution. ZnO chemical stoichiometry was determined by Energy-dispersive X-ray spectroscopy (EDS). The XRD analysis and Raman scattering reveal that ZnO deposited thin films showed hexagonal polycrystalline phase wurtzite type. The Raman spectra present four main peaks associated to the modes E 2 high , (E 2 high -E 2 low ), E 2 low and an unidentified vibrational band observed at 444, 338, 104 and 78 cm-1. The E 2 low mode involves mainly Zn atoms motion in the unit cell and the E 2 high mode is associated to oxygen motion. The observed emission peaks in the room temperature photoluminescence spectra are associated at vacancies of zinc and oxygen in the lattice.