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Structural and Electronic Properties of SiCl4-based Microcrystalline Silicon Films

  • Wolfhard Beyer (a1), Reinhard Carius (a1), Michael Lejeune (a1) and Uwe Zastrow (a1)

Abstract

Structural and electronic properties of SiCl4-based microcrystalline silicon films were studied. A rather dense (non-porous) material structure is obtained near the transition to amorphous material, in particular at substrate temperatures of 250°C and above. Boron doping results in very high conductivity values while for phosphorus doping only lower values are reached. This latter effect is attributed to a different microstructure with lower crystalline fraction, higher hydrogen and chlorine content and increased porosity in highly phosphorus- doped material.

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1. Beyer, W., Rech, B., Carius, R., Albert, M. and Terasa, R., Proceedings PV in Europe Intern. Conference, Rome, October 7-11, 2002 (WIP Munich and ETA-Florence, 2002) p. 75.
2. Beyer, W., Carius, R., Lejeune, M., Müller, J., Rech, B. and Zastrow, U., J. Non-Cryst. Solids (2004) (in press).
3. Roschek, T., Rech, B., Beyer, W., Werner, P., Edelman, F., Chack, A., Weil, R. and Beserman, R., MRS Symp. Proc. 664, A 25.5 (2001).
4. He, Y., Wei, Y., Zheng, G., Yu, M., Liu, M., J. Appl. Phys. 82, 5322(1989).
5. John, P., Odeh, T.M., Thomas, M.J.K. and Wilson, J.I.B., J. Physique Colloque 42, C4651 (1981).
6. Veprek, S., Iqbal, Z., Kühne, R.O., Capezzuto, P., Sarott, F.A. and Gimzewski, J.K., J. Phys. C: Solid State Phys. 16, 6241(1983).
7. Mück, A., Zastrow, U., Vetterl, O. and Rech, B., in: Secondary Ion Mass Spectrometry-SIMS XII (Elsevier Science, Amsterdam, 2000) p. 689.
8. Mahan, A.H., Raboisson, P., Williamson, D.L., Tsu, R., Solar Cells 21, 117(1987).
9. Beyer, W., Physica Status Solidi (c) 1, 1144(2004).
10. Beyer, W., in: Tetrahedrally Bonded Amorphous Semiconductors, ed. Adler, D. and Fritzsche, H. (Plenum Press, New York, 1985) p.129.
11. W, Beyer, Hapke, P. and Zastrow, U., Mat. Res. Soc. Symp. Proc. 467, 343(1997).
12. Payne, A.M. and Wagner, S., Appl. Phys. Lett. 76, 2949(2000).
13. Heintze, M. and Schmitt, M., Mat. Res. Soc. Symp. Proc. 420, 277(1996).
14. Carius, R., Finger, F., Backhausen, U., Luysberg, M., Hapke, P., Houben, L., Otte, M. and Overhof, H., Mat. Res. Soc. Symp. Proc. 467, 283(1997).

Structural and Electronic Properties of SiCl4-based Microcrystalline Silicon Films

  • Wolfhard Beyer (a1), Reinhard Carius (a1), Michael Lejeune (a1) and Uwe Zastrow (a1)

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