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Stress measurement Of BPDA/PDA Polyimides From Poly(Amic Acid) And Photosensitive Polyimide Precursors On Silicon

Published online by Cambridge University Press:  15 February 2011

Hideshi Nomura ,
Masuichi Eguchi ,
Katsuhiro Niwa  and
Masaya Asano
Hideshi Nomura
Affiliation:
Electronic and Imaging Materials Research Laboratories, Toray Industries, Inc., 2–1 Sonoyama 3-chome, Otsu, Shiga 520, Japan
Masuichi Eguchi
Affiliation:
Electronic and Imaging Materials Research Laboratories, Toray Industries, Inc., 2–1 Sonoyama 3-chome, Otsu, Shiga 520, Japan
Katsuhiro Niwa
Affiliation:
Electronic and Imaging Materials Research Laboratories, Toray Industries, Inc., 2–1 Sonoyama 3-chome, Otsu, Shiga 520, Japan
Masaya Asano
Affiliation:
Electronic and Imaging Materials Research Laboratories, Toray Industries, Inc., 2–1 Sonoyama 3-chome, Otsu, Shiga 520, Japan
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Abstract

The intrazeolite chemistry of the two germylene complexes Cl2(THF)GeM(CO)5(M = Mo, W) was studied with x-ray absorption spectroscopy (Ge, Mo, W edge EXAFS) and in-situ FTIR/TPD-MS techniques. The slightly decarbonylated GeMo complex interacts with the framework of NaY zeolite at room temperature and retains the Ge-Mo bond up to about 100° C. In proton-loaded HY zeolite, framework interactions increase at elevated temperature, and the attached complex retains the Ge-Mo bond up to about 120° C. The Ge-Mo bond is cleaved at higher temperatures. MoC1x and Mo-Mo species are formed in NaY and HY zeolite, respectively, while GeClx fragments are anchored to the zeolite framework.

The complex Cl2 (THF)GeW(CO) 5 retains all five CO ligands up to about 100° C in both NaY and the proton form. Detectable anchoring occurs at room temperature in NaY and at about 80° C in the proton form. WC1x species are formed upon cleavage of the Ge-W bond at higher temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 227: Symposium J – Materials Science of High Temperature Polymers for Microelectronics , 1991 , 195
Copyright
Copyright © Materials Research Society 1991

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