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Stress in Hydrogenated Microcrystalline Silicon Thin Films

  • D. Peiró (a1), C. Voz (a1), J. Bertomeu (a1), J. Andreu (a1), E. Martínez (a1) and J. Esteve (a1)...


Hydrogenated microcrystalline silicon films have been obtained by hot-wire chemical vapor deposition (HWCVD) in a silane and hydrogen mixture at low pressure (<5 × 10-2 mbar). The structure of the samples and the residual stress were characterised by X- ray diffraction (XRD). Raman spectroscopy was used to estimate the volume fraction of the crystalline phase, which is in the range of 86 % to 98%. The stress values range between 150 and -140 MPa. The mechanical properties were studied by nanoindentation. Unlike monocrystalline wafers, there is no evidence of abrupt changes in the force-penetration plot, which have been attributed to a pressure-induced phase transition. The hardness was 12.5 GPa for the best samples, which is close to that obtained for silicon wafers.



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1. Torres, P., Meier, J., Flückiger, R., Kroll, U., Selvan, J.A. Anna, Keppner, H. and Shah, A., Appl.Phys. Lett. 69, p. 1373 (1996).
2. Meiling, H., Brockhoff, A.M., Rath, J.K. and Schropp, R.E.I., J. Non-Cryst. Solids 227–230, p. 1202 (1998).
3. Yamamoto, K., Yoshimi, M., Suzuki, T., Tawada, Y., Okamoto, Y. and Nakajima, A., Proc. 2nd World Conference on Photovoltaic Solar Energy Conversion, Vol. II, 1999, p. 1284.
4. Matsumura, H., Jpn. J. Appl. Phys. 30, p. L1522 (1991).
5. Cifre, J., Bertomeu, J., Puigdollers, J., Polo, M.C., Andreu, J. and Lloret, A., Appl. Phys. A 59, p. 645 (1994).
6. Middya, A.R., Lloret, A., Perrin, J., Huc, J., Moncel, J.L., Parey, J.Y. and Rose, G. in Amorphous Silicon Technology, edited by Hack, M., Schiff, E.A., Wagner, S., Matsuda, A. and Schropp, R. (Mat. Res. Soc. Proc. 377, San Francisco, CA, 1995) pp. 119124.
7. Brodsky, M.H., Cardona, M. and Cuomo, J.J., Phys. Rev. B 16, p. 3556 (1977).
8. Kamins, T.I., Sensors and Actuators A21–23, p. 817 (1990).
9. Peiró, D., Bertomeu, J., Arrando, F. and Andreu, J., Mater. Lett. 30, p. 239 (1997).
10. Oliver, W. C. and Pharr, G. M., J. Mater. Res. 7, p. 1564 (1992).
11. Weppelmann, E. R., Field, J. S. and Swain, M. V., J. Mater. Res. 8, p. 830 (1993).


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