Skip to main content Accessibility help
×
Home

Stress in Copper thin Films With Barrier Layers

  • Richard P. Vinci (a1) and John C. Bravman (a1)

Abstract

Wafer curvature and grazing incidence x-ray scattering (GIXS) techniques were used to investigate the biaxial stresses induced in blanket Cu films during a thermal cycle to 460°C and back to room temperature. Cu was deposited by DC sputtering at ambient temperature. Several different barrier layer materials — SiO2, W, Ta, TiN, and Si3N4 — were used to compare any effect barrier choice might have on Cu microstructure evolution and mechanical behavior. Ta and Si3N4 encouraged a strong (111) Cu texture. A W barrier led to an untextured microstructure which underwent large, uneven grain growth during thermal cycling. Several samples were capped with a Ta layer which affected the stress behavior during cooling by inhibiting dislocation motion. An inverse relationship between strength and thickness was also documented.

Copyright

References

Hide All
1. Pai, P. and Ting, C., VMIC Conf. Proc., 258 (1989).
2. Ohmi, T. et al. , Int. Elec. Dev. Meeting, 8, (1991).
3. Borgesen, P. et al. , Appl. Phys. Lett., 60(14), 1706, (1992).
4. Vinci, R. et al. , presented at Spring MRS Meeting, Thin Film Reliability Symp. (1993).
5. Gardner, D. et al. , VMIC Conference, 99 (1991).
6. Hu, C.-K. et al. , VMIC Conf. Proc., 181 (1986).
7. Holloway, K and Fryer, P., MRS Symp. Proc., 181,41 (1990).
8. Nix, W., Met. Trans. A, 20A, 2217 (1989).
9. Flinn, P. et al. , IEEE Trans. on Electron Devices, ED–34, 689 (1987).
10. Doerner, M. and Brennan, S., J. Appl. Phys., 63, 126 (1988).
11. Flinn, P. and Waychunas, G., J. Vac. Sci. and Tech., B6, 1749 (1988).
12. Flinn, P., J. Mater. Res., 6(7), 1498, (1991).
13. Townsend, P., PhD Dissertation, Stanford University, Stanford CA (1987).
14. Lahiri, S., J. Appl. Phys.,41, 3172 (1970)
15. Doemer, M. et al. , J. Mater. Res., 1, 845 (1986).
16. Besser, P. et al. , presented at Spring MRS Meeting, Synch. Radiation Symp. (1993).

Stress in Copper thin Films With Barrier Layers

  • Richard P. Vinci (a1) and John C. Bravman (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed