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Stoichiometric Effects of Sputtered Barium Strontium Titanate Films

Published online by Cambridge University Press:  10 February 2011

B. A. Baumert ,
T.-L. Tsai ,
L.-H. Chang ,
T. P. Remmel ,
M. L. Kottke ,
P. L. Fejes ,
W. Chen ,
E. P. Ehlert ,
D. F. Sullivan  and
C. J. Tracy
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B. A. Baumert
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
T.-L. Tsai
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
L.-H. Chang
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
T. P. Remmel
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
M. L. Kottke
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
P. L. Fejes
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
W. Chen
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
E. P. Ehlert
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
D. F. Sullivan
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
C. J. Tracy
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
B. M. Melnick
Affiliation:
Materials Research and Strategic Technologies, Motorola, 2200 W. Broadway Rd., M360, Mesa, AZ 85202
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Abstract

Barium Strontium Titanate films have been deposited by rf magnetron sputtering and have been studied with respect to Ba/Sr ratio. Physical and electrical characterization has been done as a function of temperature, thickness, and composition, and results show that dielectric constant increases with increasing temperature, thickness (up to ∼80 nm), and Ba/Sr ratio for the compositions studied. The lattice parameters for the sputtered films are larger than those expected for powder samples and also increase with increasing Ba/Sr ratio.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 21
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1. Nowotny, J. and Rekas, M., in Key Engineering Materials (Trans Tech Publications, Switzerland, 1992), pp. 45–144.Google Scholar
2. Baumert, B. A., Chang, L.-H., Matsuda, A.T., Tsai, T.-L., Tracy, C.J., Gregory, R.B., Fejes, P.L., Cave, N.G., Chen, W., Taylor, D.J., Otsuki, T., Fujii, E., Hayashi, S., and Suu, K., J. Appl. Phys. 82, p. 2558 (1997).Google Scholar
3. Waser, R., Integrated Ferroelectrics 15, p. 39 (1997).Google Scholar
4. Horikawa, T., Kawahara, T., Yamamuka, M., and Ono, K., 1997 IEEE International Reliability Physics Symposium Proceedings, p. 82.Google Scholar
5. Tsu, R., Liu, H.-Y., Hsu, W.-Y., Summerfelt, S., Aoki, K., and Gnade, B. in Ferroelectric Thin Films IV, edited by Turtle, B.A., Desu, S.B., Ramesh, R., and Shiosaki, T. (Mater. Res. Soc. Symp. Proc. 361, Pittsburgh, PA 1995), pp. 275–280.Google Scholar
6. Lee, J., Choi, Y.-C., and Lee, B.-S., Jpn. J. Appl. Phys. 36, p. 3644 (1997).Google Scholar
7. Tsai, M.S., Sun, S.C., and Tseng, T.Y., J. Appl. Phys. 82, p. 3482 (1997).Google Scholar
8. Ueki, K., Tokiwa, A., Kikuchi, M., Suzuki, T., Nagoshi, M., Suzuki, R., Kobayashi, N., and Syono, Y., in Advances in Superconductivity II, Tsukuba, Japan, 1989, pp. 489–492.Google Scholar