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Stability of Nitrogen in Sputtered Iron Nitride thin films and Multilayers

  • H. Chatbi (a1), M. Vergnat (a1), J. F. Bobo (a1) (a2) and L. Hennet (a1)

Abstract

Different phases of FeN thin films and Fe/FeN multilayers were prepared by reactive rf sputtering. The release of nitrogen and the crystallographic transformations during annealing were monitored by thermal desorption spectrometry and X-ray diffraction experiments. Finally, the diffusivity of nitrogen in the γ-Fe4N phase was evaluated.

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Stability of Nitrogen in Sputtered Iron Nitride thin films and Multilayers

  • H. Chatbi (a1), M. Vergnat (a1), J. F. Bobo (a1) (a2) and L. Hennet (a1)

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