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Sr/Si Template Formation for the Epitaxial Growth of SrTiO3 on Silicon

  • Xiaoming Hu, Y. Liang (a1), Yi Wei (a1), J.L. Edwards (a1), R. Droopad (a1), K. Moore (a1) and W.J. Ooms (a1)...

Abstract

A novel silicon cleaning process using strontium metal thin films has been described. The silicon dioxide de-oxidation process using strontium as catalysts has been studied by X-ray Photoelectron Spectroscopy (XPS) and other in-situ techniques. A Sr/Si template for the epitaxial growth of SrTiO3 single crystals on silicon can be directly formed as a result of the above Sr-de-oxidation process. The de-oxidation mechanism can be explained after solving the interfacial structures of the Sr/SiO2/Si system with in-situ XPS.

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Sr/Si Template Formation for the Epitaxial Growth of SrTiO3 on Silicon

  • Xiaoming Hu, Y. Liang (a1), Yi Wei (a1), J.L. Edwards (a1), R. Droopad (a1), K. Moore (a1) and W.J. Ooms (a1)...

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