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Spuiter Deposition of Lithium Silicate — Lithium Phosphate Amorphous Electrolytes

  • N. J. Dudney (a1), J. B. Bates (a1), J. D. Robertson (a2) and C. F. Luck (a1)

Abstract

Thin films of an amorphous lithium-conducting electrolyte were deposited by rf magnetronsputtering of ceramic targets containing Li4SiO4 and Li3PO4. The lithium content of the films was found to depend more strongly on the nature and composition of the targets than on many other sputtering parameters. For targets containing Li4SiO4, most of the lithium was found to segregate away from the sputtered area of the target. Codeposition using two sputter sources achieves a high lithium content in a controlled and reproducible film growth.

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1. Bates, J. B., Dudney, N. J., Luck, C. F. and Klatt, L., in Ceramic Thick and Thin Films, Ceram. Trans., 11 (1990) 35.
2. Kanehori, K., Matsumoto, K., Miyauchi, K., and Kudo, T., Solid State lonics, 9/10 (1983) 1455.
3. Miyauchi, K., Matsumoto, K., Kanehori, K., and Kedo, T., Dennki Kagaku, 51 (1983) 211.
4. Bates, J. B. et al. , this symposium.
5. Hu, Y-W., Raistrick, I. D., and Huggins, R. A., J. Electrochem. Soc., 124 (1977) 1240.
6. Khorassani, A., Izquierdo, G., and West, A. R., Mat. Res. Bull., 16 (1981) 1561.
7. Wachs, A. L., Bates, J. B., Dudney, N. J., and.C. Luck, F., J. Vac. Sci. Tech., in press.
8. Waits, R. K., in Thin Film Processes, ed. by Vossen, J. L. and Kern, W., Academic Press, 1978, pp.131170
9. Barin, I and Knacke, O., Thermochemical Properties of Inorganic Substances, Springer-Verlag, 1973.
10. Machida, N., Tatsumisago, M., and Minamii, T., Yogyo Kyokai-Shi, 95 (1987) 135.

Spuiter Deposition of Lithium Silicate — Lithium Phosphate Amorphous Electrolytes

  • N. J. Dudney (a1), J. B. Bates (a1), J. D. Robertson (a2) and C. F. Luck (a1)

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