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The Spectroscopy and Photolysis of Metallo-Organic Precursors to III–V Compounds

  • Martin R Aylett (a1) and John Haigh (a1)

Abstract

This paper describes the deposition by light-stimulated breakdown of gallium and indium on borosilicate glass, gallium arsenide and indium phosphide substrates, from precursors whose ultraviolet (uv) spectra have recently been reported. Some preliminary work on the deposition of indium phosphide is also reported, using an indium-phosphorus complex whose uv spectrum is also given.

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1. Ehrlich, D. J., Osgood, R. M. and Deutsch, T. F., IEEE Journal of Quantum Electronics QE16, 1233 (1980).
2. Allen, S. D., J. Appl. Phys. 52, 6501 (1981).
3. Frolov, I. A., Druz', B. L., Boldyrevskii, P. B. and Sokolov, E. B., Izv. Akad. Nauk SSSR Neorg. Mat. 13, 906, (1977).
4. Haigh, J., Journal of Materials Science, to be published.
5. Rytz-Froidevaux, Y., Salathé, R. P., Gilgen, H. H. and Weber, H. P., Applied Physics A, 27, 133 (1982).
6. George, P. A. and Beauchamp, J. L., Thin Solid Films, 67, L25 (1980).
7. Thompson, H. W. and Linnett, J. W., Proc. Roy. Soc. 156A, 108, (1936).
8. Jacko, M. G. and Price, S. J. W., Can. J. Chem. 42, 1198 (1964).
9. Shibata, S., Bartell, L. S. and Gavin, R. M., J. Chem. Phys. 41, 717 (1964).
10. Karny, Z., Naaman, R. and Zare, R. N., Chem. Phys. Letters 59, 33 (1978).
11. For illustrations of the photochemistry of dienes see: Aspects of Organic Photochemistry, W. M. Horspool (Academic Press, London 1976).
12. Renz, H., Weidlein, J., Benz, K. W. and Pilkuhn, M. H., Electronics Letters 16, 228 (1980).
13. Moss, R. W. and Evans, J. S., Journal of Crystal Growth 55, 129 (1981).

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