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The Spectroscopy and Photolysis of Metallo-Organic Precursors to III–V Compounds

Published online by Cambridge University Press:  15 February 2011

Martin R Aylett  and
John Haigh
Martin R Aylett
Affiliation:
British Telecom Research Laboratories, Martlesham Heath, Suffolk, UK.
John Haigh
Affiliation:
British Telecom Research Laboratories, Martlesham Heath, Suffolk, UK.
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Abstract

This paper describes the deposition by light-stimulated breakdown of gallium and indium on borosilicate glass, gallium arsenide and indium phosphide substrates, from precursors whose ultraviolet (uv) spectra have recently been reported. Some preliminary work on the deposition of indium phosphide is also reported, using an indium-phosphorus complex whose uv spectrum is also given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 17: Symposium I – Laser Diagnostics and Photochemical Processing for Semiconductor Devices , 1982 , 177
Copyright
Copyright © Materials Research Society 1983

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References

REFERENCES

1. Ehrlich, D. J., Osgood, R. M. and Deutsch, T. F., IEEE Journal of Quantum Electronics QE–16, 1233 (1980).CrossRefGoogle Scholar
2. Allen, S. D., J. Appl. Phys. 52, 6501 (1981).CrossRefGoogle Scholar
3. Frolov, I. A., Druz', B. L., Boldyrevskii, P. B. and Sokolov, E. B., Izv. Akad. Nauk SSSR Neorg. Mat. 13, 906, (1977).Google Scholar
4. Haigh, J., Journal of Materials Science, to be published.Google Scholar
5. Rytz-Froidevaux, Y., Salathé, R. P., Gilgen, H. H. and Weber, H. P., Applied Physics A, 27, 133 (1982).Google Scholar
6. George, P. A. and Beauchamp, J. L., Thin Solid Films, 67, L25 (1980).CrossRefGoogle Scholar
7. Thompson, H. W. and Linnett, J. W., Proc. Roy. Soc. 156A, 108, (1936).Google Scholar
8. Jacko, M. G. and Price, S. J. W., Can. J. Chem. 42, 1198 (1964).Google Scholar
9. Shibata, S., Bartell, L. S. and Gavin, R. M., J. Chem. Phys. 41, 717 (1964).Google Scholar
10. Karny, Z., Naaman, R. and Zare, R. N., Chem. Phys. Letters 59, 33 (1978).CrossRefGoogle Scholar
11. For illustrations of the photochemistry of dienes see: Aspects of Organic Photochemistry, W. M. Horspool (Academic Press, London 1976).Google Scholar
12. Renz, H., Weidlein, J., Benz, K. W. and Pilkuhn, M. H., Electronics Letters 16, 228 (1980).Google Scholar
13. Moss, R. W. and Evans, J. S., Journal of Crystal Growth 55, 129 (1981).Google Scholar