Skip to main content Accessibility help
×
Home

Solid Phase Epitaxy of Implanted Silicon by Electron Irradiation at Room Temperature

  • G. Lulli (a1), P. G. Merli (a1) and M. Vittori Antisari (a2)

Abstract

Solid-phase epitaxy of implanted Si is observed at room temperature during in situ electron irradiation in a Transmission Electron Microscope. Results obtained from irradiation of cross sections of samples containing different doping species show that: i) the basic mechanism of the process is the migration and recombination at the amorphous-crystalline interface of radiation defects coming both from the amorphous and crystalline side; ii) the diffusion length of such defects is of the order of 40 nm; iii) the regrowth rate is impurity dependent: a factor two exists between the faste

Copyright

References

Hide All
1 Gerasimenko, N.N., Dvurechenskii, A.V., Kachurin, G.A., Pridachin, N.B. and Smirnov, L.S., Sov.Phys.-Semicond. 6, 1588 (1973)
2 Linnros, J., Svensson, B. and Holm~n, G., Phys.Rev.B 30, 3629 (1984)
3 Elliman, R.G., Johnson, S.T., Pogany, A.P. and Williams, J.S., Nucl.lnstrum. Method B 7/8, 310 (1985).
4 Cembali, G.F., Merli, P.G. and Zignani, F., Appl.Phys.Lett. 38, 808 (1981)
5 Berti, M., Drigo, A.V., Lulli, G., Merli, P.G. and Antisari, N.Vittori, phys. stat.sol.(a) 94, 85 (1986)
6 Berti, M., -Drigo, A.V., Lulli, G., Merli, P.G. and Antisari, M.Vittori, phys. stat.sol.(a) 97, 77 (1986)
7 Linnros, J. and Holmèn, G., J.Appl.Phys. 59, 1513 (1986)
8 Williams, J.S., Elliman, R.G., Brown, W.L. and Seidel, T.E., Phys.Rev.Lett. 55, 1482 (1985)
9 Lulli, G., Merli, P.G. and Antisari, M.Vittori, Phys.Rev.B., (1987) in press
10 Kendall, D.L. and DeVries, D.B. in “Semiconductor Silicon 1969” ed. by Haberecht, R.R. and Kern, E.L. (Electrochemical Society, New York 1970), p.358
11 Watkins, G.D., J.Phys.Soc.Japan 18, 22 (1963)
12 Csepregi, L., Kennedy, E.F., Gallagher, T.J. and Mayer, J.W., J.Appl.Phys. 48, 4234 (1977)

Solid Phase Epitaxy of Implanted Silicon by Electron Irradiation at Room Temperature

  • G. Lulli (a1), P. G. Merli (a1) and M. Vittori Antisari (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed