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Sol-Gel Thin Film Electronic Properties

  • W. L. Warren (a1), P. M. Lenahan (a1), C. J. Brinker (a2), G. R. Shaffer (a1), C. S. Ashley (a2) and S. T. Reed (a2)...

Abstract

We have explored the effects of various processing parameters on the dielectric and electronic integrity of sol-gel derived silicate thin films and have identified several factors that strongly affect the thin film electronic properties. We find that sol-gel dielectrics can exhibit excellent dielectric integrity: viz., low interface trap densities and fairly good insulating properties approaching those of a thermally grown SiO2 film on Si.

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1) Pande, K. P. and Gutierrez, D., Appl. Phys. Lett., 46, 416 (1985).
2) Batey, J. and Tiemey, E., J. Appl. Phys., 60, 3136 (1986).
3) LeComber, P. G. and Spear, W. E., Seminconductors and Semimetals, D21, 89 (1984).
4) Lee, J., Chen, I-C and Hu, C., IEEE Electron. Dev. Lett., 506 (1986).
5) Brinker, C. J., Keefer, K. D., Schafer, D. W., Assink, R. A., Kay, B. D. and Ashley, C. S., J. Non Cryst. Solids, 63, 45 (1984).
6) Keefer, K. D. in Better Ceramics Through Chemistry, Materials Research Society Sym. Proc., Vol. 32, eds. Brinker, C. J., Clark, D. E. and Ulrich, D. R. (North Holland, Amsterdam, 1984) p. 15.
7) Brinker, C. J., Hurd, A. J. and Ward, K. J., Ultrastructure Processing of Advanced Ceramics, (Wiley, NY, 1988) p. 223.
8) Schafer, D. W., Martin, J. E., Ward, K. J. and Keefer, K. D., in Physics of Finely Divided Matter, ed. by Boccara, N. and Daoud, M. (Springer-Verlag, Berlin, 1985) p. 13.
9) Sakka, S., Kamiya, K., Makita, K., and Yamamoto, Y., J. Non Cryst. Solids, 63, 223 (1984).
10) Terman, L. M., Solid State Electron, 5, 289 (1962).
11) Nicollian, E. H. and Brews, J. R., MOS (Metal Oxide Semiconductor) Physics and Technology, (Wiley, NY, 1981) p.800.
12) Weinberg, Z. A., Johnson, W. C. and Lampert, M. A., J. Appl. Phys., 47, 248 (1976).
13) Pliskin, W. A. and Lehman, H. S., J. Electrochem Soc., 112, 1013 (1965).
14) Lucovsky, G., Manitini, M. J., Srivastava, J. K. and Irene, E. A., J. Vac. Sci. Tech., B5, 530 (1987).
15) Brinker, C. J., Keefer, K. D., Schafer, D. W. and Ashley, C. S., J. Non Cryst. Solids, 48, 47 (1982).
16) Hurd, A. J. and Brinker, C. J., Mat. Res. Soc. Sym. Proc., Vol. 121, p. 731 (1988).
17) Brinker, C. J., Hurd, A. J., Tallant, D. R. and Ashley, C. S., submitted to Thin Solid Films.

Sol-Gel Thin Film Electronic Properties

  • W. L. Warren (a1), P. M. Lenahan (a1), C. J. Brinker (a2), G. R. Shaffer (a1), C. S. Ashley (a2) and S. T. Reed (a2)...

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