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Sol-Gel Derived Pyroelectric Barium Strontium Titanate Thin films for Infrared Detector Applications

  • Jian-Gong Cheng (a1), Jun Tang (a1), Shao-Ling Guo (a1) and Jun-Hao Chu (a1)

Abstract

Ba0.8Sr0.2TiO3 thin films that are suitable for infrared detector applications have been prepared with a sol-gel process using a highly diluted precursor solution. Columnar structure with grain size close to 200 nm was obtained with layer-by-layer homoepitaxy due to a very small thickness of individual layer. The measured pyroelecrtic coefficient is larger than 3.1×10划4 C/m2K at the temperatures ranging from 10 to 26 °C and reaches the maximum value of 4.1×10划4 C/m2K at 16.8 °C. The infrared detectivity of 4.6×107 cmHz1/2W划1 has been obtained at 19 °C and 10 Hz in the Ba0.8Sr0.2TiO3 films deposited on thick (500 μm) platinum coated silicon substrates. The better infrared response can be expected by the improvement in the thermal isolation of pyroelectric element and the electrode materials.

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