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Soft Vacuum, Pulsed Electron Beam Processing of Polyimides

  • J. Krishnaswamy (a1), L. Li (a1), G. J. Collins (a1), H. Hiraoka (a2) and Mary Ann Caolo (a3)...

Abstract

We report on the successful patterning of polyamic acid over wide areas using 28 kV pulsed electron beams produced in 30 mTorr air. The pattern degradation during the 350°C, 1/2 hr, imidizing thermal cure is prevented by pulsed, flood electron beam hardening of the developed polyamic acid patterns using the same soft vacuum, pulsed electron beam apparatus. It is also shown that a CW, low voltage, 1 to 3 kV electron beam sustained oxygen discharge can be used to completely strip the hardened, imidized material which is difficult to remove by wet methods. We also present, dose versus thickness remaining characteristics as a function of electron source to substrate distance and some examples of polyimide patterning.

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1 Endo, Atsushi, Takada, Mitsuyuki, Adachi, Kohel, Takasago, Hayato, Yada, Toshio and Onishi:, Yoichiro J.Electrochem. Soc: Solid State Science and Technol. Vol.134, No.10, (1987).
2 Reche, John J.H., Semiconductor International, 116, September (1986).
3 Brannon, J.H., Lankard, J.R., Blaise, A. I., Burns, F. and Kaufman:, J. J. Appl. Phys. 58(5), 2036, (1985).
4 Krishnaswamy, J., Li, L., Collins, G.J., Hiraoka, H., and Caolo:, H.A. SPIE Vol. 773, Electron-Beam, X-ray and Ion Beam Lithographies VI, 159 (1987).
5 Hiraoka, H., Lee, J., Hinsberg, W., Krishnaswamy, J., Li, L., and Collins:, G.J. The 172nd Meeting of the Electrochemcial Society, Symposium on Patterning Science and Technology, Honolulu, Hawaii, Oct. 1823, (1987).
6 Li, L., Hanwei, Y., Krishnaswamy, J., and Collins:, G.J. The 40th Gaseous Electronics Conference, Atlanta, Georgia, JB-10, Oct. 1316, (1987).
7 Krishnaswamy, J., Li, L., Collins, G.J., Hiraoka, H., and Caolo:, M.A. The 172nd Meeting of the Electrochemical Society, Symposium on Patterning Science and Technology, Honolulu, Hawaii, Oct. 1823, (1987).
8 Krishnaswamy, J., Li, L., Collins, G.J. and Hiraoka:, H. Materials Research Society Symposium Proceedings, Vol. 76, 91, (1987).

Soft Vacuum, Pulsed Electron Beam Processing of Polyimides

  • J. Krishnaswamy (a1), L. Li (a1), G. J. Collins (a1), H. Hiraoka (a2) and Mary Ann Caolo (a3)...

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