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Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM

  • C. Lee (a1) (a2), T. Itoh (a1), J. Chu (a1), T. Ohashi (a1), R. Maeda (a2), A. Schroth (a1) and T. Suga (a1)...

Abstract

Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.

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2 Author to whom correspondence should be addressed. e-mail: itoh@suga.rcast.u-tokyo.ac.jp

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1

Microsystems Lab., ITRI, 195, Sec. 4, Chung Hsing Rd., Chutung, Taiwan 310, Republic of China.

3

NEDO fellow on leave from Micromachine Center Japan.

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References

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1. Sarid, D., Scanning Force Microscopy. Oxford Univ. Press, New York, 1991.
2. Hansma, H. G., J. Vac. Sci. Technol. B, 14, p. 1390 (1996).
3. Yano, K., et al., J. Vac. Sci. Technol. B, 14, p. 1353 (1996).
4. Minne, S. C., Manaus, S. R., Atalar, A., and Quate, C. F., J. Vac. Sci. Technol. B, 14, p. 2456 (1996).
5. Mate, C. M., McClelland, G. M., Erlandsson, R., and Chiang, S., Phys. Rev. Lett., 59, p. 1942 (1987).
6. Goddenhenrich, T., Lemke, H., Hartmann, U., and Heiden, C., J. Vac. Sci. Technol. A, 8, p. 383 (1990).
7. Itoh, T. and Suga, T., Nanotechnology, 4, p. 218 (1993).
8. Tortonese, , Barrett, R. C., and Quate, C. F., Appl. Phys. Lett., 62, p. 834 (1993).
9. Itoh, T., Ohashi, T., and Suga, T., IEICE Trans, on Electron., E78–C, p. 146 (1995).
10. Lee, C., Maeda, R., Itoh, T., and Suga, T., Proc. 3rd France-Japan Congress & 1st Europe-Asia Congress on Mechatronics, Besançon, France, 1, p. 285 (1996).
11. Chu, J., Itoh, T., Lee, C., and Suga, T., Abstracts of NANO IV, 4th Int. Conf. on Nanometer-scale Sci. & Technol., Beijing, P.R. China (the American Vacuum Soc, New York, NY 10005, 1996), p. 27.
12. Minne, S. C., Flueckiger, Ph., Soh, H. T., and Quate, C. F., J. Vac. Sci. Technol. B, 13, p. 1380 (1995).
13. Itoh, T., Ohashi, T., and Suga, T., Proc. IEEE MEMS '96, San Deigo, (IEEE, Piscataway, NJ 08855, 1996),p. 451.
14. Chui, B. W., Stowe, T. D., Kenny, T. W., Mamin, H. J., Terris, B. D., and Rugar, D., Appl. Phys. Lett., 69, p.2767 (1996).
15. Lee, C., Itoh, T., and Suga, T., IEEE Trans. Ultras., Ferro., and Fre. control, 43, p. 553 (1996).
16. Lee, C., Ph.D. Dissertation, The University of Tokyo, Tokyo, 1996, p. 116.
17. Itoh, T., Lee, C., and Suga, T., Appl. Phys. Lett., 69, p. 2036 (1996).
18. Minne, S. C., Manaus, S. R., Atalar, A., and Quate, C. F., Appl. Phys. Lett., 68, p. 1427 (1996).
19. Rabe, U., Janser, K., and Arnold, W., Rev. Sci. Instrum., 67, p. 3281 (1996).

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Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM

  • C. Lee (a1) (a2), T. Itoh (a1), J. Chu (a1), T. Ohashi (a1), R. Maeda (a2), A. Schroth (a1) and T. Suga (a1)...

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