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Small-Angle Neutron Scattering from Device-Quality a-Si:H and a-Si:D Prepared by PECVD and HWCVD

  • D.L. Williamson (a1), D.W.M. Marr (a2), B.P. Nelson (a3), E. Iwaniczko (a3), J. Yang (a4), B. Yan (a4) and S. Guha (a4)...

Abstract

The heterogeneity of a-Si:H and a-Si:D films has been probed on the nano-scale by small-angle neutron scattering (SANS). Films were deposited by two techniques, plasma-enhanced chemical-vapor deposition (PECVD) and hot-wire chemical-vapor deposition (HWCVD) using conditions that yield high-quality films and devices. Four samples were examined in a light-soaked state (AM1.5, 300 h) and then re-examined after annealing (190°C, 1 h) in-situ to look for any change in SANS associated with the Staebler-Wronski effect. No changes were observed in the SANS intensity to a precision that could have readily detected the 25% change reported in 1985 (Chenevas-Paule et al). Significant differences are observed in hydrogenated and deuterated films, as well as in the PECVD versus the HWCVD materials.

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1. Williamson, D.L., Mater. Res. Soc. Symp. Proc. 377, 251 (1995) and therein.
2. Guha, S., Yang, J., Jones, S.J., Chen, Yan, and Williamson, D.L., Appl. Phys. Lett. 61, 1444 (1992).
3. Guha, S., Yang, J., Williamson, D.L., Lubianiker, Y., Cohen, J.D., and Mahan, A.H., Appl. Phys. Lett. 74, 1860 (1999).
4. Williamson, D.L., Mater. Res. Soc. Symp. Proc. 557, 251 (1999) and therein.
5. Leadbetter, A.J., Rashid, A.A.M., Richardson, R.M., Wright, A.F., and Knights, J.C., Solid State Commun. 33, 973 (1980).
6. Postol, T.A., Falco, C.M., Kampwirth, R.T., Schuller, I.K., and Yelon, W.B., Phys. Rev. Lett. 45, 648 (1980).
7. Leadbetter, A.J., Rashid, A.A.M., Colenutt, N., Wright, A.F., and Knights, J.C., Solid State Commun. 38, 957 (1981).
8. Bellissent, R., Chenevas-Paule, A., and Roth, M., J. Non-Cryst. Solids 59&60, 229 (1983); Physica B 117&118, 941 (1983).
9. Chenevas-Paule, A., Bellissent, R., Roth, M., and Pankove, J.I., J. Non-Cryst. Solids 77&78, 373 (1985).
10. Guy, C.A., Wright, A.F., Sinclair, R.N., Stewart, R.J., and Jansen, F., J. Non-Cryst. Solids 196, 260 (1996).
11. Russel, T.P., Lambooy, P., Barker, J.C., Gallagher, P., Satija, S.K., Kellogg, G.J., and Mayes, A.M., Macromolecules 28, 787 (1995).
12. Ho, D.L., Briber, R.M., Jones, R.L., Kumar, S.K., and Russel, T.P., Macromolecules 31, 9247 (1998).
13. Feigin, L.A. and Svergun, D.I., Structure Analysis by Small-Angle X-ray and Neutron Scattering (Plenum, New York, 1987).
14. Marr, D.W.M., Wartenberg, M., Schwatz, K.B., Agamalian, M.M., and Wignall, G.D., Macromolecules 30, 2120 (1997).
15. Menelle, A., J. Non-Cryst. Solids 97&98, 337 (1987).
16. Bellissent, R., in Amorphous Silicon and Related Materials, ed. Fritzche, H. (World Scientific, 1988) p.93.
17. Yang, J., Banerjee, A., and Guha, S., Appl. Phys. Lett. 70, 2975 (1997).
18. Wang, Q., Iwaniczko, E., Xu, Y., Nelson, B.P., and Mahan, A.H., Mater. Res. Soc. Symp. Proc. 557, 163 (1999).
19. Glinka, C.J., Barker, J.G., Hammouda, B., Krueger, S., Moyer, J.J., and Orts, W.J., J. Appl. Cryst. 31, 430 (1998).
20. Nelson, B.P., Xu, Y., Mahan, A.H., Williamson, D.L., and Crandall, R.S., Mater. Res. Soc. Symp. Proc. (this volume).
21. Fritzsche, H., Mater. Res. Soc. Symp. Proc. 467, 19 (1997), and therein.

Small-Angle Neutron Scattering from Device-Quality a-Si:H and a-Si:D Prepared by PECVD and HWCVD

  • D.L. Williamson (a1), D.W.M. Marr (a2), B.P. Nelson (a3), E. Iwaniczko (a3), J. Yang (a4), B. Yan (a4) and S. Guha (a4)...

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