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Single & Multiple Pulse Ablation of Polymeric and High Density Materials with Excimer Laser Radiation at 193NM and 248NM

Published online by Cambridge University Press:  25 February 2011

David J. Elliott ,
Ernhard P. Piwczyk ,
David J. Elliott  and
Bernhard P. Piwczyk
David J. Elliott
Affiliation:
IMAGE MICRO SYSTEMS, INC., 900 Middlesex Turnpike, Bldg #8, Billerica, Massachusetts 01821
Ernhard P. Piwczyk
Affiliation:
IMAGE MICRO SYSTEMS, INC., 900 Middlesex Turnpike, Bldg #8, Billerica, Massachusetts 01821
David J. Elliott
Affiliation:
IMAGE MICRO SYSTEMS, INC., 900 Middlesex Turnpike, Bldg #8, Billerica, Massachusetts 01821
Bernhard P. Piwczyk
Affiliation:
IMAGE MICRO SYSTEMS, INC., 900 Middlesex Turnpike, Bldg #8, Billerica, MA 01821
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Abstract

The evolution of the excimer laser from a research tool in the 1970's to the industrial models of the 1980's has opened up numerous applications in semiconductor manufacturing, materials processing, and biological and medical research. Present production-capable, computercontrolled excimer systems with handling equipment enabling efficient automation can now operate for up to 50 million shots before undergoing scheduled maintenance, with fluences remaining within ±10% in most cases. Thus, although many uses for the excimer laser are still researchoriented, production applications are rapidly emerging.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 627
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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