Hostname: page-component-84b7d79bbc-4hvwz Total loading time: 0 Render date: 2024-07-30T22:12:53.701Z Has data issue: false hasContentIssue false
  • English
  • Français

Single Crystal Zirconia Thin Films from Liquid Precursors

Published online by Cambridge University Press:  21 February 2011

K. T. Miller  and
F. F. Lange
K. T. Miller
Affiliation:
Department of Materials, University of California, Santa Barbara, CA 93106
F. F. Lange
Affiliation:
Department of Materials, University of California, Santa Barbara, CA 93106
Get access

Abstract

Epitaxial, single-crystal films of ZrO2 (Y2O3) were formed on (100) oriented single crystal substrates of ZrO2 (9.5 mol% Y2O3) using water-based solutions of zirconium acetate and yttrium nitrate as a precursor. Film compostions of ZrO2 (0 - 40 mol% Y2O3) were examined; since the lattice parameter of ZrO2 (Y2O3) increases with yttria content, the lattice mismatch was systematically varied to a maximum of 1.5%. Precursor films were deposited by spin coating, pyrolyzed, and held for 1 hour at 900°C, 1000°C, and 1100°C. X-ray diffraction showed that a strongly oriented film had developed after pyrolysis of the precursor. In addition, all samples, except those treated at 1100°C containing 6 – 15 mol% Y2O3, gave (111) peaks, indicating film polycrystallinity. Electron back-scattering patterns showed that epitaxial single crystals were formed at 1100°C for films containing 3 – 20 mol% Y2O3. Scanning electron microscopy showed that the epitaxial films had a porous structure. These results indicate that the epitaxy is a two-stage process: oriented nucleation upon pyrolysis, followed, for low mismatches, by subsequent consolidation into a single-crystal film above 1000°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 155: Symposium L – Processing Science of Advanced Ceramics , 1989 , 191
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Miller, K. T., Lange, F. F., and Marshall, D. B., p. 823–830 in Better Ceramics Through Chemistry III, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R., Materials Research Society (1988).Google Scholar
2. Miller, K. T., Lange, F. F., and Marshall, D. B., submitted to J. Mater. Res.Google Scholar
3. Partlow, D. P. and Greggi, J., J. Mater. Res. 2 (5) 595–605 (1987).Google Scholar
4. Dingley, D. J., Scanning Electron Microscopyl 1984/II 569–575 (1984).Google Scholar
5. Scott, H. G., J. Mater. Sci. 10 1527–35 (1975).Google Scholar
6. Khavari, M. E., Lange, F. F., Smith, P., and Marshall, D. B., p. 617–621 in Better Ceramics Through Chemistry III, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R., Materials Research Society (1988).Google Scholar