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Simulation of Multicomponent Thin Film Deposition and Growth

  • C. P. Burmester (a1), L. T. Wille (a2) and R. Gronsky (a1)

Abstract

Results from a multicomponent Monte Carlo simulation of the deposition and growth of YBa2Cu3O7 are presented and discussed. In particular, a detailed examination of the growth modes active during different morphological growth conditions is performed. At higher deposition rates, both [001] and [100] epitaxial variants (‘c’ and ‘a’ type growth, respectively) are observed to grow by modes attributed to the classic Volmer-Weber mechanism. At very low deposition rates, the film is observed to grow in a distinct, cyclic, multi-stage process. Small islands of [001] epitaxy nucleate and grow to one unit cell height followed by primarily horizontal growth or “ledge extension” until one unit cell layer has formed. This process then repeats. Simulated RHEED amplitude data from this growth process compares favorably to experimentally obtained data.

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1 Humphreys, R. G., Satchell, J. S., Chew, N. G., Edwards, J. A., Goodyear, S. W., Blenkisop, S. E., Dosser, O. D., ,and Cullis, A. G., Supercond. Sci. Technol., 3, 38 (1990).
2 Burmester, C. P., Wille, L. T., ,and Gronsky, R., in: Advances in Superconductivity Bando, V. Y. and Yamauchi, H., eds., Proceedings of the Fifth International Symposium on Superconductivity - ISS ‘92, Kobe, Japan, November 1992, 883 (Springer-Verlag Tokyo, 1993); C. P. Burmester, L. T. Wille and R. Gronsky, in: Structure and Properties of Interfaces in Materials, ed. by W. A. T. Clark, U. Dahmen and C. L. Briant (Materials Research Society, Pittsburgh, PA) MRS Symposium Proceedings, Boston, MA, 238, 847 (1992); C. P. Burmester, L. T. Wille and R. Gronsky, in: High Tc Superconductor Thin Films, ed. by L. Correra (Elsevier Science Publishers, Amsterdam, The Netherlands) Proceedings of the International Conference on Advanced Materials - ICAM 91, 313 (1992).
3 Burmester, C. P., Master’s Thesis, University of California at Berkeley, Berkeley, CA 94720; C. P. Burmester, L. T. Wille, R. Gronsky, J. Mater. Res., submitted.
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Simulation of Multicomponent Thin Film Deposition and Growth

  • C. P. Burmester (a1), L. T. Wille (a2) and R. Gronsky (a1)

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