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A Simple Method of Tip Shape Calibration for Nano-Indentation Test of Thin Films

  • Koichiro Hattori (a1), Junhua Xu (a1), Hidetoshi Nakano (a1) and Isao Kojima (a1)

Abstract

We have evaluated the hardness and elastic properties of thin films by using a simple procedure to calibrate the tip shape effect of the nano-indentation data. For the simplification, a truncated-shape approximation and linear fit are used to estimate the tip-shape and contact stiffness, respectively, substituting for polynomial area-function and power-law fit. The parameters used in the correction were determined by a fused silica and a single crystal silicon (100) surface. Different film/substrate systems are designed in order to assess these fitted parameters used in the correction. The transition behavior observed from the film to the substrate is well coincide with the other film thickness results, where the indentation depth above 50nm.

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1. ISO/WD 14577–4, “Metallic materials -Instrumented indentation test for hardness and materials parameters- Part 4: Test method for coatings“, International Organization for Standardization (2002).
2. Oliver, W. C. and Pharr, G. M., J. Mater. Res. 7, 1564(1992).
3. Sawa, K. and Tanaka, K., J. Mater. Res. 16, 3084(2001).

A Simple Method of Tip Shape Calibration for Nano-Indentation Test of Thin Films

  • Koichiro Hattori (a1), Junhua Xu (a1), Hidetoshi Nakano (a1) and Isao Kojima (a1)

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