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Silicon Oxycarbide Glasses from Sol-Gel Precursors

  • F. Babonneau (a1), G. D. Soraru (a2), G. D'Andrea (a2), S. Dire (a2) and L. Bois (a1)...


Silicon oxycarbide glasses have been prepared from sol-gel precursors containing not only Si-CH3, but also Si-H bonds. Three systems have been chosen containing various Si units but the same C/Si ratio. Their pyrolysis process has been mainly followed by 29Si MAS-NMR and the composition of the final glass extracted. This study shows that a suitable choice of Si-CH3 and Si-H functionnalized silicon alkoxides can lead to a strong decrease in the free carbon content and to an almost pure silicon oxycarbide phase.



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