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Self-Heating Effects in Multi-Finger AlGaN/GaN HFETs

  • M. Kuball (a1), S. Rajasingam (a1), A. Sarua (a1), M. J. Uren (a2), T. Martin (a2), R. S. Balmer (a2) and K. P. Hilton (a2)...


We report on the in-situ measurement of temperature, i.e., self-heating effects, in multi-finger AlGaN/GaN HFETs grown on SiC substrates. Optical micro-spectroscopy was used to measure temperature with 1m spatial resolution. Thermal resistance (temperature rise per W/mm) was measured as a function of device pitch and gate finger width. There is significant thermal cross talk in multi-finger AlGaN/GaN HFETs and this needs to be seriously considered for device performance and ultimately device reliability. A comparison with theoretical modeling is presented. Uncertainties in modeling parameters currently make modeling less reliable than experimental temperature assessment of devices.



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1. Kuball, M., Hayes, J.M., Uren, M. J., Martin, T., Birbeck, J.C.H., Balmer, R.S., and Hughes, B.T., IEEE Electron Dev. Lett. 23, 7 (2001).
2. Kuball, M., Surf. Interface Anal. 31, 987 (2001).
3. Liu, M.S., Bursill, L.A., Prawer, S., Nugent, K.W., Tong, Y.Z., and Zhang, G.Y., Appl. Phys. Lett. 743, 3125 (1999).
4. Florescu, D.I., Asnin, V.M., Pollak, F.H., Jones, A.M., Ramer, J.C., Schurman, M.J., and Ferguson, I., Appl. Phys. Lett. 77, 1464 (2000).
5. Allen, S.T., Sheppard, S.T., Pribble, W.L., Sadler, R.A., Alcorn, T.S., Ring, Z., and Palmour, J.W., Mat. Res. Soc. Symp. Proc. 572, 15 (1999).
6. Carslaw, H. S. and Jaeger, J. C., Conduction of Heat in Solids, Oxford Clarendon Press, Oxford, 2nd ed., 1959.
7. Florescu, D. I., Asnin, V. M., and Pollak, F. H., Compound Semiconductor 7, no. 2, 62 (2001).
8. Carter, C.H. Jr, Tsvetkov, V.F., Glass, R.C., Henshall, D., Brady, M., Müller, St.G., Kordina, O., Irvine, K., Edmond, J.A., Kong, H.-S., Singh, R., Allen, S.T., and Palmour, J.W., Mat. Sci. Engin. B 61–62, 1 (1999).
9. Landolt-Börnstein, , Numerical Data and Functional Relationships in Science and Technology, New Series, Vol. 17a (Springer, Berlin, 1982).
10. Ashcroft, N.W. and Mermin, N.D, “Solid State Physics” (Saunders, New York, 1976).
11. Daly, B. C., Maris, H. J., Nurmikko, A. V., Kuball, M., and Han, J., J. Appl. Phys. 92, 3820 (2002).


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