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Self-Aligned Nanocrystalline Silicon Thin-Film Transistor With Deposited n+ Source/Drain Layer

  • I-Chun Cheng (a1) and Sigurd Wagner (a2)

Abstract

We demonstrated self-aligned nanocrystalline silicon (nc-Si:H) n-channel thin film transistors (TFTs) with directly deposited n+ layer. The silicon layers were deposited by plasma-enhanced chemical vapor deposition at a substrate temperature of 150°C. The TFTs were made in a staggered top-gate, bottom-source/drain geometry with a seed layer underneath. The self-alignment of top-gate to the bottom-source/drain was achieved by backside exposure photolithography through the glass substrate and the silicon layers, followed by a lift-off process. An extent of gate to source/drain overlap of 1.5 mm was obtained. The self-aligned TFTs have similar characteristics to their non-self-aligned counterpart. This result represents an important step toward directly deposited nc-Si:H TFT backplanes on plastic substrates.

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1 Chen, Y. and Wagner, S., Appl. Phys. Lett., 75, 1125 (1999).
2 Cheng, I-C. and Wagner, S., Appl. Phys. Lett., 80, 440 (2002).
3 Cheng, I-C., Kattamis, A., Long, K., Sturm, J. C., and Wagner, S., J. Soc. Info. Disp., vol. 13/7, 563 (2005).
4 Kuo, Y., J. Electrochem. Soc, 139, 1199 (1992).
5 Thomasson, D. B. and Jackson, T. N., IEEE Electron Device Lett., 19, 124 (1998).
6 Yang, C. S., Read, W. W., Arthur, C., Srinivasan, E., and Parsons, G. N., IEEE Electron Device Lett., 19, 180 (1998).
7 Cheng, I-C., Kattamis, A. Z., Long, K., Sturm, J. C., and Wagner, S., IEEE Electron Device Lett., 27, 166 (2006).
8 Tzolov, M., Finger, F., Carius, R. and Hapke, P., J. Appl. Phys., 81 (11), 7376 (1997).
9 Mulato, M., Chen, Y., Wagner, S. and Zanatta, A. R., J.Non-Cryst. Solids, 266-269, 1260 (2000).
10 Platz, R. and Wagner, S., Appl. Phys. Lett., 73 (9), 1236 (1998).
11 Alpuim, P., Chu, V., and Conde, J. P., J. Vac. Sci. Technol. A, 19, 2328 (2001).
12 Cheng, I-C., Allen, S., and Wagner, S., J. Non-Crystal. Solids, 338-340, 720 (2004).

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