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Scanning Tunneling Microscope Study on Amorphous and Crystallized CoSi2 Films

Published online by Cambridge University Press:  25 February 2011

M. Kuwabara ,
D. A. Smith  and
M. E. Welland
M. Kuwabara
Affiliation:
IBM Research Division, T.J.Watson Research Center, Yorktown Heights, NY 10598.
D. A. Smith
Affiliation:
IBM Research Division, T.J.Watson Research Center, Yorktown Heights, NY 10598.
M. E. Welland
Affiliation:
Department of Engineering, University of Cambridge, England.
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Abstract

CoSi2 films were investigated using a scanning tunneling microscope (STM) to understand the film surface topology. The STM images showed that the as-deposited amorphous film had a nano-meter scale roughness which agrees with cross-sectional transmission electron microscope (TEM) observations and also had a uniform granular structure. Images of the crystallized film clearly show the crystal grain structure at the surface and the surface topography change associated with crystallization. In-situ crystallization was accomplished by operating the STM with a high bias; dome shape crystallites were produced at the surface of the amorphous films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 615
Copyright
Copyright © Materials Research Society 1991

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References

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