Skip to main content Accessibility help
×
Home

A SAXS Study of Hydrogenated Nanocrystalline Silicon Thin Films

  • Kristin Kiriluk (a1), Don Williamson (a2), David Bobela (a3), Craig Taylor (a4), Baojie Yan (a5), Jeff Yang (a6), Subhendu Guha (a7), Arun Madan (a8) and Feng Zhu (a9)...

Abstract

We have used small-angle x-ray scattering (SAXS) in conjunction with X-ray diffraction (XRD) to study the nanostructure of hydrogenated nanocrystalline silicon (nc-Si:H). The crystallite size in the growth direction, as deduced from XRD data, is 24 nm with a preferred [220] orientation in the growth direction of the film. Fitting the SAXS intensity shows that the scattering derives from electron density fluctuations of both voids in the amorphous phase and H-rich clusters in the film, probably at the crystallite interfaces. The SAXS results indicate ellipsoidal shaped crystallites about 6 nm in size perpendicular to the growth direction. We annealed the samples, stepwise, and then measured the SAXS and ESR. At temperatures below 350◦C, we observe an overall increase in the size of the scattering centers on annealing but only a small change in the spin density, which suggests that bond reconstruction on the crystallite surfaces takes place with high efficacy.

Copyright

References

Hide All
1 Meier, J., Flückiger, R., Keppner, H., and Shah, A., Appl. Phys. Lett. 65, 860 (1994)
2 Yan, B., Yue, G., Yang, J., Guha, S., Williamson, D. L., Han, D., and Jiang, C.-S., Appl. Phys. Lett. 85, 1955 (2004)
3 Warren, B. E., X-ray Diffraction (Dover, New York, 1990)
4 Feigen, L. A. and Svergun, D. I., Structure Analysis by Small-Angle X-Ray and Neutron Scattering (Plenum Press, New York, 1987)
5 Carlos, W. E. and Taylor, P. C., Phys. Rev. B 26, 3605 (1982)
6 Williamson, D. L., Mat. Res. Soc. Symp. Proc., Vol. 557, 251 (1999)
7 Kratky, O., Small Angle X-ray Scattering, edited by Glatter, O. and Kratky, O. (Academic Press, 1982).
8 Williamson, D. L., Mat. Res. Soc. Symp. Proc. 377, 251 (1995)
9 Beyer, W. and Wagner, H., J. of Appl. Phys. 53(12) (1982)
10 Zafar, S. and Schiff, E. A., Phys. Rev. B. 40 5235 (1989)

Keywords

Related content

Powered by UNSILO

A SAXS Study of Hydrogenated Nanocrystalline Silicon Thin Films

  • Kristin Kiriluk (a1), Don Williamson (a2), David Bobela (a3), Craig Taylor (a4), Baojie Yan (a5), Jeff Yang (a6), Subhendu Guha (a7), Arun Madan (a8) and Feng Zhu (a9)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.