Skip to main content Accessibility help
×
Home

Role of Surface and Growth-Zone Reactions in the Formation Process of µc-Si:H

  • A. Matsuda (a1) and T. Goto (a2)

Abstract

The role of the surface reaction is discussed in the formation process of µc-Si:H in comparison to that of a-Si:H. It is suggested that the responsible radicals for the formation of µc-Si:H are SiH3 as same in the case of a-Si:H depositions. On the top film-growing surface, a lot of H atoms reach the surface during the course of the μc-Si:H growth giving rise to the change in the surface condition, i. e. the loss probability of SiH3 radicals is increased. At the same time, a full H-coverage of the surface is expected which enhances the surface diffusion of SiH3 radicals, leading to the appearance of a gc nucleus. Moreover, it is speculated that the reaction in the growth zone is not necessary for the nucleation process in µc-Si:H.

Copyright

References

Hide All
1. Matsuda, A., J. Non-Cryst. Solids, 59&60 767 (1983).
2. Veprek, S., Chimia 34 489 (1980), and S. Veprek, Z. Iqbal, H.R. Oswald and A.P. Webb, J Phys. C 14 295 (1981).
3. Tsai, C.C., Amorphous Silicon and Related Materials, Vol.1, ed. Fritzsche, H. (World Sci. Pub., Singapore, 1989) p. 123.
4. Shibata, N., Fukada, K., Ohtoshi, H., Hanna, J., Oda, S. and Shimizu, I., Mat. Res. Soc. Symp. Proc. 95 225 (1987).
5. Itabashi, N., Kato, K., Nishiwaki, N., Goto, T., Yamada, C. and Hirota, E., Jpn. J. Appl. Phys., 22 L1565 (1988).
6. Tsai, C.C., Knights, J.C., Chang, G. and Wacker, B., J. Appl. Phys., 59 2998 (1986).
7. Matsuda, A., Nomoto, K., Takeuchi, Y., Suzuki, A., Yuuki, A. and Perrin, J., to be published in Surf. Sci.
8. Matsuda, A. and Tanaka, K., J. Appl. Phys., 60 2351 (1986).
9. Yuuki, A., Matsui, Y. and Tachibana, K., Jpn. J. App. Phys., 28 212 (1989).

Role of Surface and Growth-Zone Reactions in the Formation Process of µc-Si:H

  • A. Matsuda (a1) and T. Goto (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed