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Role of Photoeffects in Integrated Rapid Isothermal Processing
Published online by Cambridge University Press: 28 February 2011
Abstract
Rapid isothermal processing (RIP) based on incoherent radiation as the source of energy is emerging as a practical alternative to furnace processing. In this paper, we show that in addition to the well established short time processing feature, RIP can also be used as a reduced substrate temperature processing technique.
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- Copyright © Materials Research Society 1991
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