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Role of Photoeffects in Integrated Rapid Isothermal Processing

  • R. Singh (a1), S. Sinha (a2), R.P.S. Thakur (a2) and N.J. Hsu (a2)

Abstract

Rapid isothermal processing (RIP) based on incoherent radiation as the source of energy is emerging as a practical alternative to furnace processing. In this paper, we show that in addition to the well established short time processing feature, RIP can also be used as a reduced substrate temperature processing technique.

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Role of Photoeffects in Integrated Rapid Isothermal Processing

  • R. Singh (a1), S. Sinha (a2), R.P.S. Thakur (a2) and N.J. Hsu (a2)

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