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Residual Stresses in Ultrathin Metal Sublayers Within Au/Ni Multilayers

Published online by Cambridge University Press:  15 February 2011

S. Labat ,
P. Gergaud ,
O. Thomas ,
B. Gilles ,
A. Marty  and
S. Lefebvre
S. Labat
Affiliation:
MATOP, URA CNRS 1530, Faculté de St Jérôme, 13397 Marseille Cedex 20, France
P. Gergaud
Affiliation:
MATOP, URA CNRS 1530, Faculté de St Jérôme, 13397 Marseille Cedex 20, France
O. Thomas
Affiliation:
MATOP, URA CNRS 1530, Faculté de St Jérôme, 13397 Marseille Cedex 20, France
B. Gilles
Affiliation:
CEA/DRFMC/SP2M, Centre d'Etudes Nucléaires, 38054 Grenoble Cedex 9, France
A. Marty
Affiliation:
CEA/DRFMC/SP2M, Centre d'Etudes Nucléaires, 38054 Grenoble Cedex 9, France
S. Lefebvre
Affiliation:
LURE, Bt 205D, Univ. Paris Sud, 91405 Orsay Cedex, France
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Abstract

Metallic Multilayers (MLs) have attracted a considerable interest during these last years because of their unusual properties. In small periods ML's (a few nm) the high density of interfaces give rise to structures very far from equilibrium. Au/Ni multilayers have been grown in the (111) orientation by M.B.E. on Si(100) via a Cu(100) buffer layer. Two different parameters have been studied: the Au:Ni ratio at constant (4 nm) superperiod and the superperiod at constant (1:1) Au:Ni ratio. The full strain state of Au and of Ni has been determined via x-ray diffraction measurements. The high lattice parameter misfit beween Au and Ni (14%) implies that all the layers are partially relaxed. Residual strains as high as several % are encountered. The residual strain in the Au layers is clearly correlated with their thickness. A residual stress as high as 3.9 GPa is determined in the thinner layers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 475: Symposium M – Magnetic Ultrathin Films, Multilayers, and Surfaces – 1997 , 1997 , 363
Copyright
Copyright © Materials Research Society 1997

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References

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