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Residual Stresses in Sputtered ZnO Films on (100) Si Substrates by XRD


Residual stresses in sputtered ZnO films on Si are investigated and discussed. By means of X-ray diffraction, we show that as-deposited ZnO films encapsulated or not by Si3N4 protective coatings are highly compressively stressed. Moreover, a transition of stress is observed as a function of the post-deposition annealing temperature. After a heat treatment at 800°C, ZnO films are tensily stressed while ZnO films encapsulated by Si3N4 are stress-free. With the aid of in-situ X-ray diffraction, we argue that this thermally-activated stress relaxation can be attributed to a variation of the chemical composition of the ZnO films.



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1 Chen, C.S., Kuo, C.T., Wu, T.B., Lin, I.N., Jpn. J. Appl. Phys. 36, 1169 (1997)10.1143/JJAP.36.1169
2 Pearton, S.J., Norton, D.P., Ip, K., Heo, Y.W., Steiner, T., Prog. Mat. Sci. 50, 293 (2005)10.1016/j.pmatsci.2004.04.001
3 Hiramatsu, T., Furuta, M., Furuta, H., Matsuda, T., Li, C., Hirao, T., J. Cryst. Growth, 311, 282 (2009)10.1016/j.jcrysgro.2008.10.097
4 Haga, K., Suzuki, T., Kashiwaba, Y., Watanabe, H., Zhang, B.P., Segawa, Y., Thin Solid Films, 433, 131 (2003)10.1016/S0040-6090(03)00327-4
5 Sun, X.W., Kwok, H.S., J. Appl. Phys. 86, 408 (1999)10.1063/1.370744
6 Lee, H.X., Lau, S.P., Wang, Y.G., Tay, B.K., Hng, H.H., Thin Solid Films, 458, 15 (2004)10.1016/j.tsf.2003.11.167
7 Zhang, S.B., Wei, S.-H., Zunger, A., Phys. Rev. B 63, 075205 (2000)10.1103/PhysRevB.63.075205
8 Hsiao, C.-S., Chen, S.-Y., Kuo, W-Li, Lin, C.-C., Cheng, S.-Y., Nanotechnology 19, 405608 (2008)10.1088/0957-4484/19/40/405608
9 Kang, S. J., Joung, Y. H., Appl. Surf. Sci. 253, 7330 (2007)10.1016/j.apsusc.2007.03.020
10 Hwang, B., Park, K., Chun, H.-S., An, C.-H., Kim, H., Lee, H.-J., Appl. Phys. Lett. 93, 222104 (2008)10.1063/1.3031726
11 Chen, S.J., Liu, Y.C., Shao, C.L., Xu, C.S., Liu, Y.X., Wang, L., Liu, B.B., Zou, G.T., J. Appl. Phys. 99, 066102 (2006)10.1063/1.2177928
12 Puchert, M.K., Timbrell, P.Y., Lamb, R.N., J. Vac. Sci. Technol. A 14, 2220 (1996)10.1116/1.580050
13 Hauk, V., “Structural and residual stress analysis by nondestructive methods”, Elsevier (1997)
14 Tranchant, J., Tessier, P.Y., Landesman, J.P., Djouadi, M.A., Angleraud, B., Renault, P.O., Giraud, B., Goudeau, P., Surf. Coat. Technol. 202, 2247 (2008)10.1016/j.surfcoat.2007.07.030
15 Stoney, G.G., Proc. Soc. Lond. A82, 172 (1909)10.1098/rspa.1909.0021
16 Simmons, G., Wang, H., “Single elastic constants and calculated aggregate properties: a handbook”, second edition, Cambridge Massachusetts and London England (1971)
17 Hinze, J., Ellmer, K., J. Appl. Phys. 88, 2443 (2000)10.1063/1.1288162
18 Kappertz, O., Drese, R., Wuttig, M., J. Vac. Sci. Technol. A, 20, 2084 (2002)10.1116/1.1517997
19 Drese, R., Wuttig, M., J. Appl. Phys. 98, 073514 (2005)10.1063/1.2061888
20 Okada, Y., Tokumaru, Y., J. Appl. Phys. 56, 314 (1984)10.1063/1.333965
21 Ellmer, K., Klein, A., Rech, B., “Transparent conductive zinc oxide: basics and applications in thin film solar cell”, Springer series in materials science, 104 (2008)10.1007/978-3-540-73612-7
22 Conchon, F., Boulle, A., Guinebretière, R., Dooryhée, E., Hodeau, J.-L., Girardot, C., Pignard, S., Kreisel, J., Weiss, F., Libralesso, L., Lee, T. L., J. Appl. Phys. 103, 123501 (2008)10.1063/1.2938845
23 Dutta, S., Chattopadhyay, S., Sarkar, A., Chakrabarti, M., Sanyal, D., Jana, D., Prog. Mater. Sci. 54, 89 (2009)10.1016/j.pmatsci.2008.07.002
24 Zhao, J., Hu, L., Liu, W., Wang, Z., Appl. Surf. Sci. 253 (2007)
25 Wang, K., Ding, Z., Yao, S., Zhang, H., Tan, S., Xiong, F., Zhang, P., Mater. Res. Bull. 43, 3327 (2008)10.1016/j.materresbull.2008.02.013
26 Janotti, A., Walle, C.G. Van de, Phys. Rev. B 76, 165202 (2007)10.1103/PhysRevB.76.165202


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Residual Stresses in Sputtered ZnO Films on (100) Si Substrates by XRD


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