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Relationship of Processing Conditions to Growth Rate and Quality of Diamond Grown by Chemical Vapor Deposition

  • John C. Angus (a1), William D. Cassidy (a1), Long Wang (a1), Yaxin Wang (a1), Edward Evans (a1), Christopher S. Kovach (a1) and Michael A. Tamor (a2)...

Abstract

Diamond quality is strongly coupled to growth rate. Incorporation of nondiamond (sp2) carbon and morphological instabilities both increase with increasing growth rates. The intersection of twins with the growth surface produces re-entrant corners that enhance growth in the plane of the twin. Morphology and the development of texture both depend on substrate temperature and methane concentration and hence on growth rate. Experimental evidence and modeling results that relate growth rates and quality to controllable process parameters are reviewed.

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