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Reduction of thermal conductivity in semiconducting composite films consisting of silicon and transition-metal silicide nanocrystals

  • N. Uchida (a1), Y. Ohishi (a2), K. Kurosaki (a2), S. Yamanaka (a2) (a3), T. Tada (a1) and T. Kanayama (a4)...

Abstract

We observed significant reduction of thermal conductivity in semiconducting composite films of Si and molybdenum (Mo)-silicide nanocrystals (NCs). These films were synthesized by phase separation due to annealing at 700 -1000°C from sputtered amorphous Mo–Si alloy. Transmission electron microscope images showed that the NCs were grown to diameters of∼10 nm in the films by annealing at 800°C. Raman scattering spectra showed lower shift of peak positions of Si transverse optical (TO) phonon due to the confinement effect and the tensile stress. The electrical resistivity of the films was 0.17- 9 Ωm at room temperature and showed a semiconducting temperature dependence at 20-400 K. Thermal conductivity of the film was reduced to 4.4 W/mK by enhancement of phonon scattering at NC interfaces, suggesting that the composite film is promising as a high-efficiency Si-based thermoelectric material.

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1. Shanks, H. R., Maycock, P. D., Sidles, P. H., and Danielson, G. C., Phys. Rev. 130, 1743 (1963).10.1103/PhysRev.130.1743
2. Bux, S. K., Blair, R. G., Gogna, P. K., Lee, H., Chen, G., Dresselhaus, M. S., Kaner, R. B., and Fleurial, J.-P., Adv. Funct. Mater. 19, 2445 (2009).10.1002/adfm.200900250
3. Wang, Z., Alaniz, J. E., Jang, W., Garay, J. E., and Dames, C., Nano Lett. 11, 2206 (2011).10.1021/nl1045395
4. Schierning, G., Theissmann, R., Stein, N., Petermann, N., Becker, A., Engenhorst, M., Kessler, V., Geller, M., Beckel, A., Wiggers, H., and Schmechel, R.. J. Appl. Phys. 110, 113515 (2011).10.1063/1.3658021
5. Hochbaum, A. I., Chen, R., Delgado, R. D., Liang, W., Garnett, E. C., Najarian, M., Majumdar, A., and Yang, P., Nature 451, 163 (2008).10.1038/nature06381
6. Boukai, A. I., Bunimovich, Y., Tahir-Kheli, J., Yu, J. K., Goddard, W. A., and Heath, J. R., Nature 451, 168 (2007).10.1038/nature06458
7. Tang, J., Wang, H. T., Lee, D. H., Fardy, M., Huo, Z., Russel, T. P., and Yang, P., Nano Lett., 10, 4279 (2010).10.1021/nl102931z
8. Yu, J. K., Mitrovic, S., Tham, D., Varghese, J., and Heath, J. R., Nat. Nanotechnol. 5, 718 (2010).10.1038/nnano.2010.149
9. Im, J. S., Kim, H. J., and Thompson, M. O., Appl. Phys. Lett. 63, 1969 (1993).10.1063/1.110617
10. Uchida, N. and Kanayama, T., Japanese Patent No. 2010–207987 (16 September 2010).
11. Ohishi, Y., Kurosaki, K., Suzuki, T., Muta, H., Yamanaka, S., Uchida, N., Tada, T., and Kanayama, T., Thin Solid Films (submitted).
12. Piscanec, S., Cantoro, M., Ferrari, A. C., Zapien, J. A., Lifshitz, Y., Lee, S. T., Hofmann, S., and Robertson, J., Phys. Rev. B 68, 241312 (2003).10.1103/PhysRevB.68.241312
13. Poborchii, V., Tada, T., and Kanayama, T., J. Appl. Phys. 97, 104323 (2005).10.1063/1.1904157
14. Kato, R. and Hatta, I., International Journal of Thermophysics, 26, 179 (2005).10.1007/s10765-005-2365-z
15. Mingo, N., Hauser, D., Kobayashi, N. P., Plissonnier, M., and Shakouri, A., Nano Lett. 9, 711 (2009).10.1021/nl8031982
16. Kim, W., Zide, J., Gossard, A., Klenov, D., Stemmer, S., Shakouri, A., and Majumdar, A., Phys. Rev. Lett. 96, 045901 (2006).10.1103/PhysRevLett.96.045901
17. Mattheiss, L. F., Phys. Rev. B 45, 3252 (1992).10.1103/PhysRevB.45.3252
18. Fujii, M., Mimura, A., Hayashi, Shinji, Yamamoto, Y., and Murakami, K., Phys, Rev. Lett., 89, 206805 (2002).10.1103/PhysRevLett.89.206805
19. Nakamura, T., Adachi, S., Fujii, M., Miura, K., and Yamamoto, S., Phys. Rev. B 85, 045441 (2012).10.1103/PhysRevB.85.045441

Keywords

Reduction of thermal conductivity in semiconducting composite films consisting of silicon and transition-metal silicide nanocrystals

  • N. Uchida (a1), Y. Ohishi (a2), K. Kurosaki (a2), S. Yamanaka (a2) (a3), T. Tada (a1) and T. Kanayama (a4)...

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