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Recent Advances in Plasma Deposition of Functional Coatings on Polymers

Published online by Cambridge University Press:  10 February 2011

L. Martinu ,
M. R. Wertheimer  and
J. E. Klemberg-Sapieha
L. Martinu
Affiliation:
Groupe des Couches Minces (GCM), Department of Engineering Physics and Materials Engineering, Ecole Polytechnique, Montreal, Qc, H3C 3A7, Canada.
M. R. Wertheimer
Affiliation:
Groupe des Couches Minces (GCM), Department of Engineering Physics and Materials Engineering, Ecole Polytechnique, Montreal, Qc, H3C 3A7, Canada.
J. E. Klemberg-Sapieha
Affiliation:
Groupe des Couches Minces (GCM), Department of Engineering Physics and Materials Engineering, Ecole Polytechnique, Montreal, Qc, H3C 3A7, Canada.
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Abstract

Plasma enhanced chemical vapor deposition (PECVD) is increasingly being applied for the fabrication of functional coatings on polymeric substrates. This presentation briefly reviews the energetics of plasma-surface interactions leading to the deposition of films for different applications such as optical coatings, barriers against gas and vapor permeation, and protective coatings for space. Particular emphasis is placed on the formation and characterization of a relatively wide (tens of nm) interfacial region (“interphase”) between the coating and the polymer, its role in adhesion, and in optical, mechanical and other functional porperties of thin film systems on plastic substrates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 544: Symposium Y – Plasma Deposition and Treatment of Polymers , 1998 , 251
Copyright
Copyright © Materials Research Society 1999

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