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Recent Advances in FIB Technology for Nano-prototyping and Nano-characterisation

  • Debbie J Stokes (a1), Laurent Roussel (a2), Oliver Wilhelmi (a3), Lucille A Giannuzzi (a4) and Dominique HW Hubert (a5)...

Abstract

Combined focused ion beam (FIB) and scanning electron microscopy (SEM) methods are becoming increasingly important for nano-materials applications as we continue to develop ways to exploit the complex interplay between primary ion and electron beams and the substrate, in addition to the various subtle relationships with gaseous intermediaries.

We demonstrate some of the recent progress that has been made concerning FIB SEM processing of both conductive and insulating materials for state-of-the-art nanofabrication and prototyping and superior-quality specimen preparation for ultra-high resolution scanning transmission electron microscopy (STEM) and transmission electron microscopy (TEM) imaging and related in situ nanoanalysis techniques.

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References

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1. Wilhelmi, O., Reyntjens, S., Roussel, L., J., Stokes D. and Hubert, D.H.W. High Resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM). (Manuscript in preparation).
2. Morrissey, F., Reyntjens, S, Nakahara, K and Jiao, C., Methods for Structuring and Prototyping on a Nanoscale Using a DualBeam. Microsc. Microanal., 2005. 11(Suppl 2)
3. Anzalone, P.A., Mansfield, J.F. and Giannuzzi, L.A., DualBeam Milling and Deposition of Complex Structures Using Bitmap Files and Digital Patterning. Microsc. Microanal., 2004. 10 (Suppl 2): p. 11541155.
4. Stokes, D.J, Vystavel, T and Morrissey, F (2006) Focused Ion Beam (FIB) Milling of Electrically Insulating Specimens Using Simultaneous Primary Electron and Ion Beam Irradiation. Journal of Physics D: Applied Physics, 40, 874877.
5. Galtrey, M.J., Oliver, R.A., Kappers, M.J., Humphreys, C.J., Stokes, D.J., Clifton, P.H. and Cerezo, A (2007) Three Dimensional Atom Probe Studies of an InxGa1-xN/GaN Multiple Quantum Well Structure: Assessment of Possible Indium Clustering. Applied Physics Letters 90 (6).
6. Giannuzzi, L.A., Guerts, R. and Ringnalda, J, 2 kV Ga+ FIB milling for reducing amourphous damage in silicon. Microsc. Microanal., 2005. 11(Suppl 2): p. 828829.
7. Kujawa, S., Freitag, B. and Hubert, D.H.W., An aberration Corrected (S)TEM Microscope for Nanoresearch. Microscopy Today, July 2005: p. 1621.
8. Hubert, , DHW (2007) International Lab News.
9. Kato, N.I. et al. , J. Vac. Sci. Technol. A 17(4) (1999) 1201.
10. Jinschek, J.R. et al. , Microsc. Microanal., 10(supp 2) (2004) 1142.
11. Langford, R.M. and Petford-Long, A.K., J.Vac.Sci.Technol., A 19(3) (2001) 982.

Keywords

Recent Advances in FIB Technology for Nano-prototyping and Nano-characterisation

  • Debbie J Stokes (a1), Laurent Roussel (a2), Oliver Wilhelmi (a3), Lucille A Giannuzzi (a4) and Dominique HW Hubert (a5)...

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