Skip to main content Accessibility help
×
Home

Recent Achievement in the GaN Epitaxy on Silicon and Engineering Substrates

  • Wilk Arnaud (a1), Melania Lijadi (a2), Robert Langer (a2), Philippe Bove (a2), James Thorpe (a3), Hervé Blanck (a3), Virginie Hoel (a4), Nicolas Defrance (a4) and Jean-Claude DeJaeger (a5)...

Abstract

Since the middle of the 90's, GaN epitaxy techniques have been developed, using either MOCVD or MBE growth methods. A low cost approach is presented aiming at satisfying thermal issues encountered on conventional substrates such as SiC, Sapphire and more recently Silicon. Domain of application are being covered with their associated challenges: RF and High Power applications. Stress engineering is one of the key parameters.

Copyright

References

Hide All
[1]. Langer, R. et al, GaAs MANTECH 2006, April 2006 Vancouver
[2]. Bove, P., Lahreche, H., Da Cruz, D., Faure, B., Letertre, F., Boussagol, A., “Progress in Microwave GaN HEMTs on Silicon and Smart Cut™ engineered substrates for high power applications”, CSMAX 2004 Monterey US
[3]. Bove, P., Lahreche, H., Thuret, J., Letertre, F., Faure, B., “Manufacturing Engineered wafers for GaN RF power application”, GAASMANTECH 2005
[4]. Cioccio, L.Di., Letertre, F., Le Tiec, Y., Papon, A.M., Jaussaud, C., Bruel, M., “Silicon Carbide on Insulator formation by Smart Cut process”, Mat. Sci. and Eng. B Vol. 46 (1997), p. 349
[5]. Faure, B., Boussagol, A., Letertre, F., Lahreche, H., Bressot, S., Da Cruz, D., and Bove, P., “Recent progress on Engineered Substrates for GaN microelectronic applications”, 207th ECS meeting proceedings (2005)

Keywords

Recent Achievement in the GaN Epitaxy on Silicon and Engineering Substrates

  • Wilk Arnaud (a1), Melania Lijadi (a2), Robert Langer (a2), Philippe Bove (a2), James Thorpe (a3), Hervé Blanck (a3), Virginie Hoel (a4), Nicolas Defrance (a4) and Jean-Claude DeJaeger (a5)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed