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Real-time x-ray scattering study of sputter-deposited LaNiO3 thin films on Si substrates

  • Hsin-Yi Lee (a1), Chih-Hao Lee (a2), Keng S. Liang (a1) and Tai-Bor Wu (a3)


Real-time x-ray reflectivity and diffraction measurements under in-situ sputtering deposition conditions were performed to study the crystallization behavior of LaNiO3thin films on Si substrate. We found that an amorphous layer of 60 Å was grown in the first 6 min of the deposition and subsequently a polycrystalline overlayer was developed as observed from the in-situ x-ray reflectivity curves and diffraction patterns. Polycrystalline columnar textures of (110) and (100) were grown on the top of this amorphous film. By comparing the integrated intensities of two Bragg peaks in the plane normal of x-ray diffraction, it was found that the ability of (100)-texturization enhanced with increasing film thickness over a certain critical value.



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Real-time x-ray scattering study of sputter-deposited LaNiO3 thin films on Si substrates

  • Hsin-Yi Lee (a1), Chih-Hao Lee (a2), Keng S. Liang (a1) and Tai-Bor Wu (a3)


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