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Realization of an Amorphous N-I-P-I-N Three Color Sensor

Published online by Cambridge University Press:  15 February 2011

K. Eberhardt ,
T. Neidlinger  and
M. Schubert
K. Eberhardt
Affiliation:
Inst. f. Physikalische Elektronik, Univ. Stuttgart, Pfaffenwaldring 47, D-70569 Stuttgart, Germany
T. Neidlinger
Affiliation:
Inst. f. Physikalische Elektronik, Univ. Stuttgart, Pfaffenwaldring 47, D-70569 Stuttgart, Germany
M. Schubert
Affiliation:
Inst. f. Physikalische Elektronik, Univ. Stuttgart, Pfaffenwaldring 47, D-70569 Stuttgart, Germany
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Abstract

Utilizing the high optical absorption of amorphous silicon in conjunction with advanced signal processing capabilities of modern ASICs offers the possibility of simply realizing smart color sensors with random pixel access and without any losses in active area due to the signal processing circuitry. Thin-film photodiodes have to be incorporated into a layer sequence of ASIC/insulator/metal/a-Si:H based multilayer/TCO for this so-called Thin Film on ASIC (TFA) concept[l]. Amorphous silicon and silicon carbide photodiodes have been studied, and discrimination of the fundamental colors (red, green and blue) has been obtained from 2-terminal n-i-p-i-n devices at small bias voltages within ±2 V. Changing of the bias voltage applied to the two back-to-back p-i-n junctions allows for adjusting the location of predominant photo-carrier collection, and therefore enables color readout according to the energy dependent absorption profile of the incident light. Film thickness and optical bandgap of the individual layers have been optimized to achieve optimum color sensitivity. Switching experiments in the voltage mode give some information about conceivable frame rates these TFA sensors could be operated at. Light-induced degradation does not hamper the performance of the sensors thanks to low light intensity, reverse bias conditions, and small i-layer thickness.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 827
Copyright
Copyright © Materials Research Society 1995

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References

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