Hostname: page-component-8448b6f56d-t5pn6 Total loading time: 0 Render date: 2024-04-18T09:24:38.050Z Has data issue: false hasContentIssue false

Real Time Observation and Characterization of Dislocation Motion, Nitrogen Desorption and Nanopipe Formation in GaN

Published online by Cambridge University Press:  15 March 2011

Eric A. Stach
Affiliation:
National Center for Electron Microscopy, Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720:, email: EAStach@LBL.gov; http://ncem.lbl.gov
C.F. Kisielowski
Affiliation:
National Center for Electron Microscopy, Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720:, email: EAStach@LBL.gov; http://ncem.lbl.gov
W.S. Wong
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, CA 94720
T. Sands
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, CA 94720
N.W. Cheung
Affiliation:
Department of Electrical Engineering and Computer Science, University of California, Berkeley 94720
Get access

Abstract

Despite the considerable attention focused on GaN and related alloys during the past decade, many outstanding questions remain regarding the mechanisms of defect formation in these materials. In this work, we take advantage of a recently developed processing technique known as laser lift-off to examine the behavior of thin, free-standing, nearly stress-free single crystals of GaN subjected to thermal stimulus. GaN layers of 7 νm thickness were removed from their sapphire growth substrate using the laser lift-off method, then ion-milled to electron transparency. The samples were then annealed at temperatures between 850 and 1025 °C within the objective lens of a 200 kV transmission electron microscope. This allowed real time observation of defect formation via diffraction contrast imaging. Above 925 °C nitrogen desorption first becomes visible at the thinnest edges of the TEM sample. Concomitant with this is the preferential desorption of nitrogen along the cores of those dislocations which are pure screw in character, resulting in the formation of nanopipes. In regions with small residual stresses, those dislocations with mixed edge and screw components propagate parallel to the basal plane in the three close-packed {1 1 00} directions, leaving a hollow tube in their wake. At these temperatures, no motion of dislocations with pure edge character is observed. These results indicate that desorption and plasticity may occur simultaneously in these materials. Additionally, it appears that nanopipe formation may be unavoidable during heteroepitaxial growth by chemical vapor deposition and hydride vapor phase epitaxy, as these deposition methods require substrate temperatures of this magnitude.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Nakamura, S. et al. MRS Int. J. Nitride Semi. Res., 4S1, 1999.Google Scholar
2 For a review, see Denbaars, S.P, Proc. IEEE; 85, 1740 1997.Google Scholar
3 Frank, F.C., Acta. Cryst. 4, 497, (1951); Z. Lilenthal-Weber, Phys. Rev. Lett. 79, 2835 (1997).Google Scholar
4 Lester, S.D., Ponce, F.A., Craford, M.G. and Steigerwald, D.A., Appl. Phys. Lett. 66, 1249 (1995).Google Scholar
5 For a thorough discussion of the role of defects on III-nitride optoelectronics, see Nakamura, S., Science, 281, 956, 1998.Google Scholar
6 Wong, W.S., Sands, T., and Cheung, N.W., Appl. Phys. Lett. 72, 599 (1998).Google Scholar
7 Wong, W.S. et al. ; Proc. Symp. on LED for Optoelectronic Applications, 98–2, 377 (1998).Google Scholar
8 “Quicktime” movies of these experiments can be found at http://ncem.lbl.gov/GaNdesorptionGoogle Scholar
9 Cherns, D., Young, W.T. and Ponce, F.A., Mat. Sci. Eng. B 50, 76, (1997).Google Scholar
10 Sugiura, L., Appl. Phys. Lett. 70, 1317 (1997); J. Appl. Phys. 81, 1633 (1997).Google Scholar
11 From “Interpretation of transmission electron micrographs”, vol 3. of Practical Electron Microscopy in Materials Science, J.W. Edington, MacMillan /Philips, Eindhoven, 1975. See in particular sections 3.4.8 through 3.4.10, pp. 2223.Google Scholar