Skip to main content Accessibility help

Reaction Of Amorphous And Crystalline Alloys With Silicon

  • L. S. Hung (a1), S. Q. Wang (a1), J. W. Mayer (a1) and F. W. Saris (a2)


The reaction of Ni- refractory metal alloys with silicon has been studied by backscattering spectrometry and transmission electron microscopy. The analysis of the as-deposited sample revealed solid solutions for Ni-Cr and amorphous phases for Ni-Ta and Ni-Ti. In situ annealing resulted in crystallization of Ni43 Ta57 at 750 °C, a value above the reaction temperature of the alloy with silicon. The amorphous alloy of Ni48Ti52 was transformed into the equilibrium compound of NiTi at 450 °C, much below the reaction temperature. Phase separation has been observed in the Ni-Cr and Ni-Ta systems with a Ni- silicide layer next to the Si substrate and a refractory disilicide layer on the other side. In contrast, Si reacts with the NiTi compound to form a uniform mixed layer with a composition of NiTiSi2. The different behavior is explained based on considerations of both thermodynamic and kinetic terms.



Hide All
1. Mayer, J. W., Lau, S. S., and Tu, K. N., J. Appl. Phys. 50, 5585 (1979).
2. Tu, K. N., Hammer, W. N., and Olowolafe, J. O., J. Appl. Phys. 51, 1663 (1980).
3. Eizenberg, M. and Tu, K. N., J. Appl. Phys. 53, 1577 (1982).
4. Ottaviani, G., Tu, K. N., Mayer, J. W., and Tsour, B. Y., Appl. Phys. Lett. 36, 331 (1980).
5. Thompson, R. D., Tu, K. N., and Ottaviani, G., J. Appl. Phys. 58, 705 (1985).
6. Zhu, M. F., Suni, I., Nicolet, M.-A., and Sands, T., J. Appl. Phys. 56, 2740 (1984).
7. See for example, Ottaviani, G. and Mayer, J. W., in Relibility and Degradation, edited by Howes, M. J. and Morgan, D. V. (Wiley, New York, 1981), chapt. 2.
8. X-ray Power Data File, JCPDS (1984).
9. Hung, L. S. and Mayer, J. W., submitted to J. Appl. Phys.
10. Miedema, A. R., de Chatel, P. F., and de Boer, F. R., Physia, 100B, 1 (1980).
11. Lien, C. D., Nicolet, M.-A., and Lau, S. S., Phys. Stat. Sol.(a) 81, 123 (1984).
12. Zheng, L. R., Hung, L. S., and Mayer, J. W., submitted to MRS 1985 (Abstract EP1.22).

Reaction Of Amorphous And Crystalline Alloys With Silicon

  • L. S. Hung (a1), S. Q. Wang (a1), J. W. Mayer (a1) and F. W. Saris (a2)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed