Hostname: page-component-76fb5796d-25wd4 Total loading time: 0 Render date: 2024-04-25T09:04:09.217Z Has data issue: false hasContentIssue false
  • English
  • Français

Raman Scattering and Luminescence Study of Rapid Annealing and Laser Irradiation Effects in Ion Implanted InP

Published online by Cambridge University Press:  22 February 2011

D. Kirillov  and
J.L. Merz
D. Kirillov
Affiliation:
Department of Electrical and Computer Engineering University of California, Santa Barbara, CA 93106
J.L. Merz
Affiliation:
Department of Electrical and Computer Engineering University of California, Santa Barbara, CA 93106
Get access

Abstract

Raman scattering and luminescence spectroscopic techniques were applied to the study of ion implantation of InP and its annealing by a lamp, oven, or laser beam. It was found that both characterization techniques give important information on surface layer transformation during implantation and annealing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983 , 707
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Devlin, G.E., Davis, Y.L., Chase, L., and Geschwind, S., Appl. Phys. Lett. 19, 138 (1971).Google Scholar
2.Kirillov, D. and Merz, J.L., Mat. Res. Symp. Proc. 17, 95 (1983).Google Scholar
3.Kirillov, D. and Merz, J.L., J. Appl. Phys. 54, 4104 (1983).Google Scholar
4.Rama Rao, C.S., Sundaram, S., Schmidt, R.L., and Comas, J., J. Appl. Phys. 54, 1808 (1983).Google Scholar
5.Borchered, P.H., Alfvey, G.F., Saunderson, D.H., and Woods, A.D.B., J. Phys. C8, 2022 (1975).Google Scholar
6.Lax, M., J. Appl. Phys. 48, 3919 (1977).Google Scholar
7.Lax, M., Appl. Phys. Lett. 33, 786 (1978).Google Scholar
8.Maycock, P.D., Solid St. Electr. 10, 161 (1967).Google Scholar
9.Nissim, Y.I., Lietoila, A., Gold, R.B., and Gibbons, J.F., J. Appl. Phys. 51, 274 (1980)Google Scholar
10.Piesbergen, U., Semiconductors and Semimetals, V.2, ed. by Willardson, R.K. and Beer, A.C. (Academic Press, N.Y., London, 1966), p. 49.Google Scholar