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Pulsed-Laser Deposition and Characterization of Amorphous Diamondlike Carbon Films

  • Y. Huai (a1), J. N. Broughton (a1), E. Gat, M. Chaker (a1), C. F. M. Borges (a2), Y. Beaudoin (a1), H. PÉpin (a1) and M. Moisan (a2)...

Abstract

Unhydrogenated amorphous carbon films were deposited by KrF pulsed laser ablation of graphite under a laser power density of 8×108 W/cm2. The films were characterized using x-ray reflectivity, optical transmittance, spectroscopic ellipsometry and Raman spectroscopy. The physical, optical and bonding properties of the films have been investigated in detail as functions of substrate temperatures Ts (22-300°C) and post-annealing temperatures. Films deposited at Ts , <200°C possessed diamond-like properties with mass densities p=2.8-3.1 g/cm3 and optical bandgaps Eg,=1.5-2.2 eV. Above Ts,=200°C, the films showed typical graphite characteristics. The diamond-like films annealed at temperatures up to 750°C show excellent thermal stability.

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[1] Deshpandey, C. V. and Bunshah, R. F., J. Vac. Sci. Technol. A 7, 2294 (1989).
[2] Wang, C. Z. and Ho, K. M., Phys. Rev. Lett. 71, 1184 (1993).
[3] Kumar, N., Xie, C., Potte, N., Krishnan, A., Hilbert, C., Eichman, D., Schlam, E., Schmidt, H., and Wagal, S., SID 93 Digest, 1009 (1993).
[4] Collins, C. B., Davanloo, F., Lee, T. J., Park, H., and You, J. H., J. Vac. Sci. Technol. B 11, 1936 (1993).
[5] Pappas, D. L., Saenger, K. L., Bruley, J., Krakow, W., Cuomo, J. J., Gu, T., and Collins, R. W., J. Appl. Phys. 71, 5675 (1992); J. J. Cuomo, D. L. Pappas, J. Bruley, J. P. Doyle, and K. L. Saenger, ibid, 70, 1706 (1991).
[6] Xiong, F., Wang, Y. Y., Leppert, V., and Chang, R. P. H., J. Mater. Res., 8, 2265 (1993).
[7] Huai, Y., Chaker, M., Broughton, J. N., Gat, E., Pöpin, H., Gu, T., Bian, X., and Sutton, M., submitted to Appl. Phys. Lett..
[8] Heald, S. M. and Nielsen, B., J. Appl. Phys. 72, 4669 (1992); C. A. Lucas, T. D. Nguyen, and J. B. Kortright, Appl. Phys. Lett. 59, 2100 (1991).
[9] Chen, H. and Heald, S. M., J. Appl. Phys. 66, 1793 (1989).
[10] Huai, Y., Cochrane, R. W., and Sutton, M., Phys. Rev. B 48, 2568 (1993).
[11] Tamor, M. A. and Wu, C. H., J. App. Phys. 67, 1007 (1993).
[12] Forouhi, A. R., and Bloomer, I., Phys. Rev. B 34, 7018 (1986).
[13] Huai, Y., Broughton, J. N., and Chaker, M., unpublished.
[14] Dillon, R. O., J, A. Woollam, and Katkanard, V., Phys. Rev. B 29, 3482 (1984).
[15] Bhushan, B., Kellock, A. J., Cho, N. H., and Ager, W. A., J. Mater. Res. 7, 404 (1992).

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Pulsed-Laser Deposition and Characterization of Amorphous Diamondlike Carbon Films

  • Y. Huai (a1), J. N. Broughton (a1), E. Gat, M. Chaker (a1), C. F. M. Borges (a2), Y. Beaudoin (a1), H. PÉpin (a1) and M. Moisan (a2)...

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