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Pulsed Laser Excited Microwave Photo Conductivity Applications to High Resolution Defect Diagnostics OP Ion and Laser Beam Modified Semiconductor Surface
Published online by Cambridge University Press: 25 February 2011
Abstract
A novel diagnostic technique for the studies of semiconductor surfaces is described. Experimental data on nonlocal modification effects in laser produced scribing, doping and annealing of ion implanted GaAs and Si are presented. Mechanisms of nonlocal structural and electric properties changes under modification are analyzed. Nonlocality phenomena are concluded to be universal for any strong modification procedure and very important for microelectronics technology.
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- Copyright © Materials Research Society 1993