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P-type Nitrogen Doped ZnO Films Grown By Thermal Evaporation

  • Wei Mu (a1), Lei Guo (a2), Lei Kerr (a3) and David C. Look (a4)

Abstract

We report the formation of p-type nitrogen doped ZnO (ZnO:N) grown by thermal-evaporation deposition. The effects of nitrogen precursors on the electrical and optical properties of ZnO:N were investigated. This study shows that growth process plays a critical role in the electrical properties of ZnO:N. The chemical reaction mechanism was analyzed.

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