Skip to main content Accessibility help
×
Home

Pt/Au and W/Pt/Au Schottky Contacts to Bulk n-ZnO.

  • Kelly Ip (a1), Brent Gila (a1), Andrea Onstine (a1), Eric Lambers (a1), Young-Woo Heo (a1), David Norton (a1), Stephen Pearton (a1), Jeffrey LaRoche (a2) and Fan Ren (a2)...

Abstract

UV-ozone cleaning prior to metal deposition of either e-beam Pt contacts or sputtered W contacts on n-type single-crystal ZnO is found to significantly improve their rectifying characteristics. Pt contacts deposited directly on the as-received ZnO surface are Ohmic but show rectifying behavior with ozone cleaning. The Schottky barrier height of these Pt contacts was 0.70 eV, with ideality factor of 1.5 and a saturation current density of 6.2 × 10−6 A·cm−2. In contrast, the as-deposited W contacts are Ohmic, independent of the use of ozone cleaning. Post-deposition annealing at 700 °C produces rectifying behavior with Schottky barrier heights of 0.45 eV for control samples and 0.49 eV for those cleaned with ozone exposure. The improvement in rectifying properties of both the Pt contacts is related to removal of surface carbon contamination from the ZnO.

Copyright

References

Hide All
1. Look, D.C., Mater. Sci. Eng. B80, 383 (2001).
2. Garcia, P.F., McLean, R.S., Reilly, M.H. and Nunes, G. Jr, Appl. Phys. Lett. 82, 1117 (2003).
3. Kim, K., Kim, H., Hwang, D., Lim, J., Park, S., Appl. Phys. Lett, 83, 63 (2003).
4. Heo, Y. W., Park, S. J., Ip, K., Pearton, S. J., Norton, D. P., D.P., , Appl. Phys. Lett., 83, 1128 (2003).
5. Wraback, M., Shen, H., Liang, S., Gorla, C.R. and Lu, Y., Appl. Phys. Lett. 74, 507 (1999).
6. Look, D.C., Reynolds, D.C., Hemsky, J.W., Jones, R.L. and Sizelove, J.R., Appl. Phys. Lett. 75 811 (1999).
7. Look, D.C., Hemsky, J.W. and Sizelove, J.R., Phys. Rev. Lett. 82, 2552 (1999).
8. Auret, F.D., Goodman, S.A., Hayes, M., Legodi, M.J., van Laarhoven, H.A. and Look, D.C., Appl. Phys. Lett. 80, 956 (2002).
9. Kucheyev, S.O., Bradley, J.E., Williams, J.S., Jagadish, C. and Swain, M.V., Appl. Phys. Lett. 80, 956 (2002).
10. Wraback, M., Shen, H., Liang, S., Gorla, C.R., and Lu, Y., Appl. Phys. Lett. 76, 507 (1999).
11. Aoki, T., Look, D.C., and Hatanaka, Y., Appl. Phys. Lett. 76, 3257 (2000).
12. Krishnamoorthy, S., Iliadis, A.A., Inumpudi, A., Choopun, S., Vispute, R.D. and Venkatesan, T., Solid-State Electron. 46, 1631 (2002).
13. Lee, J.-M., Kim, K.-K., Park, S.-J. and Choi, W.-K., Appl. Phys. Lett. 78, 3842 (2001).
14. Iliadis, A.A., Vispute, R.D., Venkatesan, T., and Jones, K.A., Thin Solid Films, 420–421, 478 (2002).
15. Inumpudi, , Iliadis, A.A., Krishnamoorthy, S., Choopun, S., Vispute, R.D., and Venkatesan, T., Solid-State Electron. 46, 1665 (2002).
16. Kim, H.-K., Han, S.-H., Seong, T.-Y., and Choi, W.-K., J., Appl, Phys. Lett. 77, 1647 (2000).
17. Sheng, H., Emanetoglu, N.W., Muthukumar, S., Feng, S., and Lu, Y., J. Electron. Mater., 31, 811 (2002).
18. Sheng, H., Emanetoglu, N.W., Muthukumar, S., Yakshinskiy, B.V., Feng, S., and Lu, Y., J. Electron. Mater., 32, 935 (2003).
19. Kim, H.-K., Kim, K.-K., Park, S.-J., Seong, T.-Y., and Adesida, I., J. Appl. Phys. 94, 4225 (2003).
20. Kim, S.Y., Jang, H.W., Kim, J.K., Jeon, C.M., Park, W.I., Yi, G.C., and Lee, J.-L., J. Electron. Mater., 31, 868 (2002).
21. Mead, C.A., Phys. Lett. 18, 218 (1965).
22. Neville, R.C. and Mead, C.A., J. Appl. Phys. 41, 3795 (1970).
23. Sheng, H., Muthukumar, S., Emanetoglu, N.W. and Lu, Y., Appl. Phys. Lett. 80, 2132 (2002).
24. Auret, F.D., Goodman, S.A., Hayes, M., Legodi, M.J and van Laarhoven, H.A., Appl. Phys. Lett. 79, 3074 (2001).
25. Coppa, B.J., Davis, R.F. and Nemanich, R.J., Appl. Phys. Lett. 82, 400 (2003).
26. Polyakov, A.Y., Smirnov, N., Kozhukhova, E., Vdovin, V., Ip, K., Heo, Y.W., Norton, D.P. and Pearton, S.J., Appl. Phys. Lett. 83, 1575 (2003).
27. Ip, K., Baik, K., Heo, Y.W., Norton, D.P., Pearton, S.J., LaRoche, J.R., Ren, F. and Zavada, J.M., J. Vac. Sci. Technol. B 21, 2378 (2003).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed