In order to apply P(VDF-TeFE) piezoelectric polymer to micro-generator as a membrane, the polymer is deposited on a substrate by spin-coating method. In this process, some changes of properties and quality of the film are caused by a solvent which was used to dissolve the polymer granule. Since a solvent affects the film properties and surface stability, we have carried out the thermal process at a temperature higher than melting point. However, this thermal process due to a temperature higher than Curie point of the polymer causes a falling-off in electrical properties. In this paper, we have studied a method to prevent a falling-off in electric properties of P(VDF-TeFE) film even though the film is annealed at a temperature higher than Curie point.